31st Annual Proceedings Reliability Physics 1993 1993
DOI: 10.1109/relphy.1993.283273
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Reliability of InGaAs/InP photodiodes passivated with polyimide

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“…3; (b) Bias temperature instability (BTI) The second potential root cause for the increase in dark current was related to the surface leakage current associated with mobile ion migration. For the polyimide passivation, there was some trace amount of impurities such as Na and Cu contained in the film (Watanabe et al, 1996;Pereira et al, 1993). Those impurities were likely to diffuse along the interface or into the passivation film driven by the high electric field at the depletion layer, as illustrated in Figure 3a.…”
Section: Resultsmentioning
confidence: 99%
“…3; (b) Bias temperature instability (BTI) The second potential root cause for the increase in dark current was related to the surface leakage current associated with mobile ion migration. For the polyimide passivation, there was some trace amount of impurities such as Na and Cu contained in the film (Watanabe et al, 1996;Pereira et al, 1993). Those impurities were likely to diffuse along the interface or into the passivation film driven by the high electric field at the depletion layer, as illustrated in Figure 3a.…”
Section: Resultsmentioning
confidence: 99%