Reliability of vibration energy harvesters of metal-based PZT thin films

Tsujiura, Yuichi; Suwa, Eisaku; Kurokawa, Fujio; Hida, Hirotaka; Kanno, Isaku

doi:10.1088/1742-6596/557/1/012096

Cited by 12 publications

(10 citation statements)

References 14 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Table 3 shows the performance of our VEH and comparison with other cantilever-type piezoelectric VEHs. According to the reports by Kanno et al, the output of their VEHs composed of ceramic PZT film achieved 1-17 μW [6][7][8][9][10]. However, the vibration frequency of power generating test was 108-890 Hz.…”

Section: Figure 13mentioning

confidence: 99%

“…In many cases, the structure of piezoelectric VEH is like this: piezoelectric thin film is deposited on the surface of leaf spring made of metal or single crystal silicon. Weight is set on the tip of the spring [4][5][6][7][8][9][10][11][12][13]. By matching the design of leaf spring to the vibration condition, it can generate electric power under low frequency vibration and low acceleration.…”

Section: Introductionmentioning

confidence: 99%

“…In previous study, Refs. [6][7][8][9][10] fabricated piezoelectric VEHs using ceramic piezoelectric material. They fabricated cantilever-type piezoelectric VEHs.…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Piezoelectric Vibration Energy Harvester Using Polyvinylidene Difluoride Film Formed by Bar-Coating Method and Its Spray- Coating Method on a Three Dimensional Surface

Takise¹,

Suzuki²,

Takahashi³

et al. 2018

Piezoelectricity - Organic and Inorganic Materials and Applications

View full text Add to dashboard Cite

A cantilever-type vibration energy harvester (VEH) made of polyvinylidene difluoride (PVDF) was fabricated and characterized. PVDF is one of the polymer piezoelectric materials, which is more flexible than ceramic-based piezoelectric materials such as lead zirconate titanate (PZT). The fabrication process of VEH is as follows: a PVDF film was coated on a phosphor bronze plate by bar-coating method, followed by polarization by corona discharge method. Aluminum top electrode was deposited on the PVDF film by sputtering. One end of the plate was clamped by a fixture to form a cantilever, the length of which is 25 mm. Output power P at the resonance frequency (=55 Hz) was measured as a function of load resistance R with the acceleration set at 17 m/s 2 . Maximum output reached 4.3 μW at R = 2.1 MΩ. This result is not inferior compared with other reported VEHs using ceramic piezoelectric material. Spray coating was carried out to form PVDF film on a 3D surface. This method is suitable for fabricating a uniform thin film on a three-dimensional (3D) surface, even if it is complicatedly curved. In this study, PVDF film was formed on a 3D helical compressing spring, and the deposition on it was successfully achieved.

show abstract

Section: Figure 13mentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Piezoelectric Vibration Energy Harvester Using Polyvinylidene Difluoride Film Formed by Bar-Coating Method and Its Spray- Coating Method on a Three Dimensional Surface

Takise¹,

Suzuki²,

Takahashi³

et al. 2018

Piezoelectricity - Organic and Inorganic Materials and Applications

View full text Add to dashboard Cite

show abstract

“…Piezoelectric thin films are of great importance to realize high-performance micro-electromechanical systems (MEMS), such as micro-sensors, actuators and energy harvesters [1][2][3][4] [6][7][8], BiFeO 3 (BF) [9] and BaTiO 3 (BT) [10][11][12][13] in pure and modified forms. Specifically, KNN-and BT-based high performance piezoelectrics have been discovered and systematically studied in the last decade [6,11,14,15].…”

Section: Introductionmentioning

confidence: 99%

Electromechanical properties of BaTiO3-xBaSnO3 thin films prepared via combinatorial sputtering

Cheng

Hida

Ouyang

et al. 2017

Ceramics International

View full text Add to dashboard Cite

(1−x)BaTiO 3-xBaSnO 3 (BT-xBS, 0≤x≤0.20) perovskite thin films were deposited on Pt/Ti/Si substrates with uniaxial graded composition by using a dual-target combinatorial sputtering technique. These films were highly (101)-oriented and showed strong composition dependence in their electromechanical properties. The maximum value of the relative dielectric constant was 925 at around x = 0.028, where the transverse piezoelectric coefficient |e 31, f | also peaked at about 1.5-1.9 C/m 2. This |e 31, f | value is higher than those of epitaxial BaTiO 3 thin films. Our results indicate that BT-xBS is a promising substitute of lead-based perovskites for applications in piezoelectric MEMS devices.

show abstract

“…In many cases, the structure of piezoelectric VEH is like this: piezoelectric thin film is deposited on the surface of leaf spring made of metals or single-crystal silicon. A weight is set on the tip of spring [4][5][6][7][8][9][10][11][12][13]. They can generate electric power under low frequency vibration and low acceleration by adjusting the design of leaf spring to the vibration condition.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of piezoelectric vibration energy harvester using coatable PolyVinylidene DiFluoride and its characterisation

Takise

Takahashi

Suzuki

et al. 2017

Micro & Nano Letters

View full text Add to dashboard Cite

A cantilever-type vibration energy harvester (VEH) made of PolyVinylidene DiFluoride (PVDF) was fabricated and characterised. PVDF is one of polymer piezoelectric material, which is more flexible than ceramic-based piezoelectric materials such as lead zirconate titanate. Since PVDF dissolves in organic solvent, it is coatable on substrate or parts, making it compatible with micro electro mechanical systems process. The fabrication process of VEH is as follows: a PVDF film (thickness: 30 µm) was coated on a phosphor bronze rectangular plate (length: 35 mm, width: 15 mm, thickness: 0.1 mm) by bar-coating method, followed by polarisation by corona discharge method. Aluminium top electrode (length: 30 mm, width: 10 mm, thickness: 0.3 μm) was deposited on the PVDF film by DC sputtering. One end of the plate was clamped by a fixture to form a cantilever, the length of which is 25 mm. Finally, a proof mass (m = 0.2 g) was attached to the free end of cantilever. Output power P at resonant frequency (= 55 Hz) was measured as a function of load resistance R, in which acceleration was set to 17 m/s 2. Maximum output of 4.3 µW was achieved at R = 2.1 MΩ, which is not inferior to those of reported VEHs using ceramic piezoelectric materials.

show abstract

Reliability of vibration energy harvesters of metal-based PZT thin films

Cited by 12 publications

References 14 publications

Piezoelectric Vibration Energy Harvester Using Polyvinylidene Difluoride Film Formed by Bar-Coating Method and Its Spray- Coating Method on a Three Dimensional Surface

Piezoelectric Vibration Energy Harvester Using Polyvinylidene Difluoride Film Formed by Bar-Coating Method and Its Spray- Coating Method on a Three Dimensional Surface

Electromechanical properties of BaTiO3-xBaSnO3 thin films prepared via combinatorial sputtering

Fabrication of piezoelectric vibration energy harvester using coatable PolyVinylidene DiFluoride and its characterisation

Contact Info

Product

Resources

About