Reliable PZT CMP Technology for Novel Fram Capacitors

Microwave Properties of Ba-Substituted Pb(Zr0.52Ti0.48)O3 after Chemical Mechanical Polishing

“…Several publications have reported CMP processes and post-CMP cleaning procedures for PZT thin films fabricated by sol-gel techniques [24][25][26] or MOCVD. 27,28 However, no report has been published on the CMP of BPZT deposited by PLD. Moreover, the effect of the CMP process on the ferroelectric 25,26 and piezoelectric 29 properties of PZT has not been studied comprehensively and the impact on the microwave dielectric properties is still unknown.…”