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We investigated a novel technique of modifying the interface between a Pb(ZrxTi1-x)O3 (PZT) thin film and electrodes for high density 64 Mbit ferroelectric random access memory (FRAM) device. Using a SrRuO3 buffer layer, we successfully developed highly reliable 0.15 µm/14 F2 cell FRAM capacitors with 75-nm-thick polycrystalline PZT thin films. The SrRuO3 buffer layer greatly enhanced ferroelectric characteristics due to the decrease in interfacial defect density. In PZT capacitors with a total thickness of 180 nm for whole capacitor stack, a remnant polarization of approximately 42 µC/cm2 was measured with a 1.4 V operation. In addition, an opposite state remnant polarization loss of less than 15% was observed after baking at 150 °C for 100 h. In particular, we found that the SrRuO3 buffer layer also played a key role in inhibiting the diffusion of Pb and O from the PZT thin films.

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Metal organic chemical vapor deposition (MOCVD) of Pb(Zr x Ti 1−x )O 3 (PZT) and its capacitor module process were established for ferroelectric memory device integration. The 130 nm-thick PZT films were deposited on Ir layers at 530 • C or 550 • C. The remnant polarization of the Ir/IrO 2 /PZT/Ir capacitors is in the range of 15 to 21 µC/cm 2 , and their leakage current is 10 −5 A/cm 2 at 2.5 V without additional annealing. The degradation in their switching endurance is less than 5% after 10 10 cycles, indicating that the interfaces formed between the PZT and Ir layers can be optimized to improve their fatigue properties. To evaluate the capacitors on the devices, the conventional backend process was performed after encapsulating the capacitors with AlO x /TiO x layers located on the poly-Si plug. High charge separation and fully functional bit activities were obtained, demonstrating that this MOCVD-PZT process is a reliable integration scheme for high-density ferroelectric memory devices.

In the manufacturing of a 32M ferroelectric random access memory (FRAM) device on the basis of 0.25 design rule (D/R), one of the most difficult processes is to pattern a submicron capacitor module while retaining good ferroelectric properties. In this paper, we report the ferroelectric property of patterned submicron capacitor modules with a stack height of 380 nm, where the 100 nm-thick Pb(Zr, Ti)O 3 (PZT) films were prepared by the sol-gel method. After patterning, overall sidewall slope was approximately 70 • and cell-to-cell node separation was made to be 80 nm to prevent possible twin-bit failure in the device. Finally, several heat treatment conditions were investigated to retain the ferroelectric property of the patterned capacitor. It was found that rapid thermal processing (RTP) treatment yields better properties than conventional furnace annealing. This result is directly related to the near-surface chemistry of the PZT films, as confirmed by X-ray photoelectron spectroscopy (XPS) analysis. The resultant switching polarization value of the submicron capacitor was approximately 30 µC/cm 2 measured at 3 V.