2022
DOI: 10.1021/acsaelm.2c00997
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Remote Epitaxy and Exfoliation of GaN via Graphene

Abstract: The remote epitaxy of GaN via graphene has attracted much attention due to the potential of easy mechanical exfoliation, and the exfoliated layers can be transferred onto foreign substrates according to the application needs, which is beneficial to improve the performance of GaN-based devices. In this work, a GaN epi-layer was grown by metal–organic chemical vapor deposition on the monolayer-graphene-coated AlN/sapphire or GaN substrates. The influence of growth temperature, carrier gas, and substrate on the e… Show more

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Cited by 14 publications
(19 citation statements)
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“…We note that metal atoms such as Al, Ga, and In do not lead to carbon-loss, reported in the following studies [ 178 , 182 , 227 ]. Similar results for graphene loss on III-nitride substrate have been reported elsewhere [ 40 , 205 , 228 ].
Fig.
…”
Section: Interaction Between Growth Technique 2d Material and Substra...supporting
confidence: 89%
See 1 more Smart Citation
“…We note that metal atoms such as Al, Ga, and In do not lead to carbon-loss, reported in the following studies [ 178 , 182 , 227 ]. Similar results for graphene loss on III-nitride substrate have been reported elsewhere [ 40 , 205 , 228 ].
Fig.
…”
Section: Interaction Between Growth Technique 2d Material and Substra...supporting
confidence: 89%
“…Aluminum Nitride (AlN) is a material with a wurtzite structure and a lattice mismatch of ~ 2.4% with GaN. The polarity of AlN substrates is rather advantageous for improving the crystal quality of GaN growth, and is another good candidate for remote epitaxy [ 40 , 200 205 ]. Zhang et al succeeded in high-quality GaN growth, including low-threading dislocation through the modulation of graphene surface states by transferring graphene on sputtered AlN templates [ 200 ].…”
Section: Interaction Between Growth Technique 2d Material and Substra...mentioning
confidence: 99%
“…This process is no longer remote epitaxy but a special kind of epitaxial lateral overgrowth (ELOG) (41). As previously reported (17,25,(42)(43)(44)(45), remote epitaxy is a promising method for fabricating transferable III-nitride films and light-emitting devices. Remote epitaxy of single-crystal GaN(0001) films on graphene/GaN(0001) templates has been reported at a growth temperature of ~700°C by MBE (18,24).…”
Section: Discussionmentioning
confidence: 78%
“…Since the 1970s, Olsen et al proposed that wide-bandgap semiconductors have high energy conversion efficiency . Researchers subsequently developed a series of wide band gap semiconductors: gallium nitride (GaN), silicon carbide (SiC), zinc oxide (ZnO), titanium dioxide (TiO 2 ), and diamond . Among wide-bandgap semiconductors of wide interest, ZnO has attracted particular attention because of high radiation tolerance, excellent chemical stability, low cost, and environmental friendliness. , Moreover, ZnO exhibits a high exciton binding energy (60 meV), a high breakdown strength, and much higher electron mobility than titanium oxide (TiO 2 ) (155 cm 2 ·V –1 ·s –1 vs 10 –5 cm 2 ·V –1 ·s –1 ), which would be favorable for electron transmission. , Among the many forms of ZnO, one-dimensional (1-D) ZnO nanofibers with the surface effect and the quantum-size effect have a large specific surface area and 1-D charge transport .…”
Section: Introductionmentioning
confidence: 99%