“…Several studies concerning these properties have been reported in the literature [2][3][4][5]. Of particular interest is the study of the physical properties of its junctions with metals, since the reliability of the devices highly depends on the stability of their contacts [6][7][8][9][10][11][12]. In the present work, electron microscopy and atomic force microscopy (AFM) are used to clarify which are the experimental conditions for the growth of Pd thin films on 6H-SiC.…”