1987
DOI: 10.1063/1.98513
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Reproducible technique for fabrication of thin films of high transition temperature superconductors

Abstract: We report on a new process to make films of Y1Ba2Cu3O7 using coevaporation of Y, Cu, and BaF2 on SrTiO3 substrates. The films have high transition temperatures (up to 91 K for a full resistive transition), high critical current densities (106 A/cm2 at 81 K), and a reduced sensitivity to fabrication and environmental conditions. Because of the lower reactivity of the films, we have been able to pattern them in both the pre-annealed and post-annealed states using conventional positive photoresist technology.

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Cited by 416 publications
(59 citation statements)
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“…4 The method yields high-quality c-axis perpendicular films with 10-//m grains, critical current density ^:2xl0 6 A cm ~2 at 77 K, and a-b -plane resistivity of 400 /iftcmat 295 K. We found the penetration-depth measurement itself to be a sensitive and critical test of film quality.…”
Section: Renormalization Of the Mean-field Superconducting Penetratiomentioning
confidence: 96%
“…4 The method yields high-quality c-axis perpendicular films with 10-//m grains, critical current density ^:2xl0 6 A cm ~2 at 77 K, and a-b -plane resistivity of 400 /iftcmat 295 K. We found the penetration-depth measurement itself to be a sensitive and critical test of film quality.…”
Section: Renormalization Of the Mean-field Superconducting Penetratiomentioning
confidence: 96%
“…[61,62] Many of these CSD processes have been developed for depositing YBCO films. [25,63] [20,64] During pyrolysis of the MOD films, the thermodynamically stable BaF 2 phase is formed rather than BaCO 3 , which is difficult to convert to the BaO needed in the reaction to form YBCO. In both the MOD-or PVD-BaF 2 processes, the BaF 2 is effectively converted to BaO at higher temperatures by reaction with H 2 O that leads to the release of HF.…”
Section: Mod Ybco Coated Conductorsmentioning
confidence: 99%
“…14 The use of water vapor in this process precludes the use of either YSZ or MgO as the growth template for YBCO, both of which degrade rapidly in the presence of water vapor at the required 700°C-800°C processing temperatures. Instead, we use 4% Nb-doped SrTiO 3 ͑Nb:STO͒, which grows biaxially oriented onto Ni͑100͒ tapes from a sol-gel deposition.…”
mentioning
confidence: 99%