Research of Frequency Splitting Caused by Uneven Mass of Micro-Hemispherical Resonator Gyro

Song, Lijun; Li, Qingru; Zhao, Weiduo; Zhang, Tianxiang; He, Xing

doi:10.3390/mi13112015

Cited by 3 publications

(2 citation statements)

References 18 publications

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“…Similarly, by replacing the outside surface position in the geometric parameter evaluation equations with the inside surface position, the inside surface curvature radius R I of the HSR can be obtained using equation (5). As illustrated in figure 4(b), according to equations ( 6) and ( 7), the insidesurface center of the circumferential cross-section of the HSR is C I (x CI , y CI ) and the inside surface roundness is ε I .…”

Section: Principle Of Measurement For 2d Multiple Geometric Parametersmentioning

confidence: 99%

A normal tracking differential confocal measurement method for multiple geometric parameters of hemispherical shell resonator with a common reference

Liu,

Zhang,

et al. 2024

Meas. Sci. Technol.

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This paper proposes a normal tracking differential confocal measurement method for the inside and outside surface profiles, shell thickness uniformity, and central asymmetry of inside and outside surfaces of the hemispherical shell resonator (HSR). A differential confocal technique with high-transmittance focusing ability is used to measure a single point on the inside and outside surfaces of the HSR. The normal alignment measurement technique is used to accurately measure the inside and outside surfaces and shell thickness of the HSR with a common reference in one measurement process. The HSR is step-rotated to synchronously collect information on the inside and outside surfaces, and using the differential confocal sensor to measure the different normal-section profiles. The experimental results indicate successful measurement of HSR central asymmetry. The repeated measurement accuracy for the inside and outside surface profiles and thickness uniformity is better than 30 nm.

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Section: Principle Of Measurement For 2d Multiple Geometric Parametersmentioning

confidence: 99%

A normal tracking differential confocal measurement method for multiple geometric parameters of hemispherical shell resonator with a common reference

Liu,

Zhang,

et al. 2024

Meas. Sci. Technol.

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show abstract

“…Frequency splitting is the main error affecting the accuracy of HRG [ 9 , 10 ], and the structural parameters of the hemispherical resonator play a significant role in it. To improve the accuracy of the HRG, suppress frequency splitting, and optimize the structural parameters of the hemispherical resonator’s equivalent bottom angle, this paper analyzes the influence of structural parameters of the hemispherical resonator on the 4-antinodes vibration mode frequency value and mass sensitivity factor, theoretically.…”

Section: Introductionmentioning

confidence: 99%

Simulation and Optimization of Hemispherical Resonator’s Equivalent Bottom Angle for Frequency-Splitting Suppression

Gao,

Wang,

Wang

et al. 2023

Micromachines

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As an inertial sensor with excellent performance, the hemispherical resonator gyro is widely used in aerospace, weapon navigation and other fields due to its advantages of high precision, high reliability, and long life. Due to the uneven distributions of material properties and mass of the resonator in the circumferential direction, the frequencies of the two 4-antinodes vibration modes (operational mode) of resonator in different directions are different, which is called frequency splitting. Frequency splitting is the main error source affecting the accuracy of the hemispherical resonator gyro and must be suppressed. The frequency splitting is related to the structure of the resonator. For the planar-electrode-type hemispherical resonator gyro, in order to suppress the frequency splitting from the structure, improve the accuracy of the hemispherical resonator gyro, and determine and optimize the equivalent bottom angle parameters of the hemispherical resonator, this paper starts from the thin shell theory, and the 4-antinodes vibration mode and waveform precession model of the hemispherical resonator are researched. The effect of the equivalent bottom angle on the 4-antinodes vibration mode frequency value under different boundary conditions is theoretically analyzed and simulated. The simulation results show that the equivalent bottom angle affects the 4-antinodes vibration mode of the hemispherical resonator through radial constraints. The hemispherical resonator with mid-surface radius R=15 mm and shell thickness h=1 mm is the optimization object, and the stem diameter D and fillet radius R1 are experimental factors, with the 4-antinodes vibration mode frequency value and mass sensitivity factor as the response indexes. The central composite design is carried out to optimize the equivalent bottom angle parameters. The optimized structural parameters are: stem diameter D=7 mm, fillet radii R1=1 mm, R2=0.8 mm. The simulation results show that the 4-antinodes vibration mode frequency value is 5441.761 Hz, and the mass sensitivity factor is 3.91 Hz/mg, which meets the working and excitation requirements wonderfully. This research will provide guidance and reference for improving the accuracy of the hemispherical resonator gyro.

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A low noise capacitance to voltage readout circuit based on active feedback charge sensitive amplifier for micro-gyro

Liu,

Gu,

Liu

et al. 2024

Review of Scientific Instruments

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Trans-impedance amplifier (TIA) based capacitance–voltage (C–V) readout circuits are widely used in micro-machined gyroscopes’ control system. In this work, the noise performance of a TIA and charge sensitive amplifier (CSA) based C–V readout circuit is analyzed in detail. The theoretical derivation and simulation experiments carried out in this paper show that the thermal noise of high value feedback resistors in TIA dominates the output noise of the circuit, while a CSA-based readout circuit can overcome this shortcoming. Then, a CSA-based C–V readout circuit is designed with a 1.8 V transistor on a 180 nm complementary metal-oxide-semiconductor. This C–V-based readout circuit occupies an area of 0.039 mm2, which is smaller than the area of a 0603 package resistor. When 1 V bias voltage (Vb) is added to the capacitors under test, the tested C–V gain of this circuit is as high as 225 dB, and the tested output noise of the circuit is less than 150 nV/Hz. Finally, the fabricated chip achieved a resolution of 840 zF/Hz at Vb as low as 1 V. This CSA-based C–V readout circuit has more advantages in terms of noise and area over the TIA circuit and is more suitable for integration into the interface integrated circuit for micro-gyroscopes.

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Research of Frequency Splitting Caused by Uneven Mass of Micro-Hemispherical Resonator Gyro

Cited by 3 publications

References 18 publications

A normal tracking differential confocal measurement method for multiple geometric parameters of hemispherical shell resonator with a common reference

A normal tracking differential confocal measurement method for multiple geometric parameters of hemispherical shell resonator with a common reference

Simulation and Optimization of Hemispherical Resonator’s Equivalent Bottom Angle for Frequency-Splitting Suppression

A low noise capacitance to voltage readout circuit based on active feedback charge sensitive amplifier for micro-gyro

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