Research on a Novel MEMS Sensor for Spatial DC Electric Field Measurements in an Ion Flows Field

Abstract

Thus far, despite the development of electric field sensors (EFSs) such as field mills, optoelectronic EFSs and microelectromechanical system (MEMS)-based EFSs, no sensor can accurately measure an electric field in space due to the existence of space charge and the influence of charge attachment. To measure a spatial synthetic electric field in an ion flow field, a double potential independent differential EFS based on MEMS is proposed. Compared with other EFSs, this method has the advantages of independent potential (without grounding) and the ability to support the measurement of the synthetic ion flow electric field in space. First, to analyse the charge distribution after the sensor is involved exposed to an electric field, a simulation model was constructed. Then, given the redistribution of the spatial electric field in space and the influence of the surface charge on the sensor, the quantitative relationship between the electric field to be measured and that measured by the proposed sensor was obtained. To improve the performance of the EFS, a set of synthetic field strength sensor calibration systems that consider spatial ion flow injection was established. Furthermore, the parameter λ, which is related to the relative position of the differential chips, was determined. Finally, a series of comparative experiments indicated that the differential EFS highlighted in the present study exhibits good linearity and accuracy.

New insight on filamentary charge‐loaded flows originated by pulsating glow‐type unipolar coronas in atmospheric air

“…But instead, additionally validating by on‐plane detections that the smoothed‐out E ave ‐field identifies with the undistorted E L ‐field, namely that the theoretical function ( E L / E L,r ) col and the corresponding experimental distribution are substantially undistinguishable, is not entirely straightforward. In fact, unlike the detection of current distributions, the use of commercially available fieldmills, adopted as sensors of the smoothed‐out electric field, cannot be relied upon precisely because their calibration rules out the existence of impinging ion flows (see [29] and related papers).…”

An anti-charge-interference three-dimensional electric field sensor

“…To solve this problem, a combined difference method was proposed [27], but no experimental verification was conducted. A novel MEMS sensor for measuring spatial DC electric fields in an ion flow field was developed [28,29]. However, it is limited to one-dimensional electric field measurement under HVDC transmission lines.…”

Electric field sensing characteristics of ZnO/SiO2/Si surface acoustic wave devices

“…The sensor measured the electric field by detecting the vibration of the cantilever beam based on the piezoelectric effect [12,13]. Then, they improved the sensing structures by introducing piezoelectric sensing and capacitive detection to get high-sensitivities [14][15][16][17]. The United States Army Research Laboratory for Sensors and Electronic Devices had also developed a field mill MEMS electric field sensor.…”