Research on a small tunnel magnetoresistive accelerometer based on 3D printing

Yang, Bo; Wang, Binlong; Gao, Xiangpeng

doi:10.1007/s00542-018-4218-2

Cited by 10 publications

(9 citation statements)

References 13 publications

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“…The prototype achieved a sensitivity of 0.32 mV/g and a noise density of 35 µg/Hz 0.5 . A small tunneling magnetoresistive accelerometer based on 3D printing has been implemented with a bias stability of 64.40 µg in the literature [26]. However, due to the tolerance limitation of 3D processing technology, the volume of the entire device is too large, and it is difficult to further reduce the minimum gap, which limits the further improvement of sensitivity.…”

Section: Introductionmentioning

confidence: 99%

A Novel Micromachined Z-axis Torsional Accelerometer Based on the Tunneling Magnetoresistive Effect

Yang

Gao

2020

Micromachines

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A novel micromachined z-axis torsional accelerometer based on the tunneling magnetoresistive effect is presented in this paper. The plane main structure bonded with permanent magnetic film is driven to twist under the action of inertial acceleration, which results in the opposite variation of the magnetic field intensity. The variation of the magnetic field is measured by two differential tunneling magnetoresistive sensors arranged on the top substrate respectively. Electrostatic feedback electrodes plated on the bottom substrate are used to revert the plane main structure to an equilibrium state and realize the closed-loop detection of acceleration. A modal simulation of the micromachined z-axis tunneling magnetoresistive accelerometer was implemented to verify the theoretical formula and the structural optimization. Simultaneously, the characteristics of the magnetic field were analyzed to optimize the layout of the tunneling magnetoresistance accelerometer by finite element simulation. The plane main structure, fabricated with the process of standard deep dry silicon on glass (DDSOG), had dimensions of 8000 μm (length) × 8000 μm (width) × 120μm (height). A prototype of the micromachined z-axis tunneling magnetoresistive accelerometer was produced by micro-assembly of the plane main structure with the tunneling magnetoresistive sensors. The experiment results demonstrate that the prototype has a maximal sensitivity of 1.7 mV/g and an acceleration resolution of 128 μg/Hz0.5 along the z-axis sensitive direction.

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Section: Introductionmentioning

confidence: 99%

A Novel Micromachined Z-axis Torsional Accelerometer Based on the Tunneling Magnetoresistive Effect

Yang

Gao

2020

Micromachines

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“…Tunneling Magnetoresistance (TMR) effect at present is another effective measurement technique that is widespread in the detection of structural deformation caused by pressure, displacement, and inertial quantities, etc. [ 15 , 16 , 17 , 18 ]. The tunneling current of TMR sensor is governed by the changes in direction and intensity of the external magnetic field, which permits a broader dynamic interval than quantum tunneling effect [ 17 , 18 ].…”

Section: Introductionmentioning

confidence: 99%

“…[ 15 , 16 , 17 , 18 ]. The tunneling current of TMR sensor is governed by the changes in direction and intensity of the external magnetic field, which permits a broader dynamic interval than quantum tunneling effect [ 17 , 18 ]. The first TMR-based pressure sensor was directly made from Magnetic Tunnel Junctions (MTJs) [ 15 ], which utilized the magnetization rotation to change the TMR value, further detecting the external strain or stress.…”

Section: Introductionmentioning

confidence: 99%

“…Hence, the displacement of microstructure could be acquired through demodulating the output of MR sensor. Literatures [ 17 , 21 ] proposed a TMR-based MEMS accelerometer using three-dimensional (3D)-print and micromachined sensing structures respectively. Both of them adopted an integrated TMR sensor to detect the position change of the permanent magnet, further recognizing the input acceleration.…”

Section: Introductionmentioning

confidence: 99%

“…The experimental results indicated that the final sensitivities of the two devices are 409.01 mV/g and 8.85mV/g, respectively. Literature [ 22 ] reported another accelerometer with the similar operating principle to ones from [ 17 , 21 ]. The peculiarity of latter one is the use of the simpler but more effective micro-cantilever sensing structure, and the test results demonstrated the system could achieve measurement resolution of 17.35 µg/

.…”

Section: Introductionmentioning

confidence: 99%

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Design, Analysis and Simulation of a MEMS-Based Gyroscope with Differential Tunneling Magnetoresistance Sensing Structure

Yang

Guo

et al. 2020

Sensors

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The design, analysis, and simulation of a new Micro-electromechanical System (MEMS) gyroscope based on differential tunneling magnetoresistance sensing are presented in this paper. The device is driven by electrostatic force, whereas the Coriolis displacements are transferred to intensity variations of magnetic fields, further detected by the Tunneling Magnetoresistance units. The magnetic fields are generated by a pair of two-layer planar multi-turn copper coils that are coated on the backs of the inner masses. Together with the dual-mass structure of proposed tuning fork gyroscope, a two-stage differential detection is formed, thereby enabling rejection of mechanical and magnetic common-mode errors concurrently. The overall conception is described followed by detailed analyses of proposed micro-gyroscope and rectangle coil. Subsequently, the FEM simulations are implemented to determine the mechanical and magnetic characteristics of the device separately. The results demonstrate that the micro-gyroscope has a mechanical sensitivity of 1.754 nm/°/s, and the micro-coil has a maximum sensitivity of 41.38 mOe/µm. When the detection height of Tunneling Magnetoresistance unit is set as 60 µm, the proposed device exhibits a voltage-angular velocity sensitivity of 0.131 mV/°/s with a noise floor of 7.713 × 10−6°/s/Hz in the absence of any external amplification.

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Acceleration Sensors: Sensing Mechanisms, Emerging Fabrication Strategies, Materials, and Applications

Babatain

Bhattacharjee

Hussain

et al. 2021

ACS Appl. Electron. Mater.

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Accelerometers are among the most mature sensor technologies with a broad range of applications in multiple fields and industries. They represent the most widely used microelectromechanical system (MEMS) devices with excellent and reliable performance. MEMS acceleration sensors established dominance mainly in navigation and control applications. In recent years, however, recent technologies and materials have emerged that introduce novel sensing mechanisms, improve performance, enable customization, reduce cost, and reduce fabrication complexity. Herein, the recent advances in accelerometers based on MEMS and recent emerging technologies are reviewed. This work provides a comprehensive review of accelerometers' sensing mechanisms and the main characteristics and features of each type of sensor, material, and fabrication strategies used to fabricate them. From the aspect of sensor application, this work focuses on reviewing applications that demonstrate the use of accelerometers manufactured using unconventional technologies and materials in prevailing fields such as healthcare monitoring, automotive industry, navigation, building, and structural monitoring. Moreover, challenges and future efforts needed to be addressed in this field are summarized.

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Research on a small tunnel magnetoresistive accelerometer based on 3D printing

Cited by 10 publications

References 13 publications

A Novel Micromachined Z-axis Torsional Accelerometer Based on the Tunneling Magnetoresistive Effect

A Novel Micromachined Z-axis Torsional Accelerometer Based on the Tunneling Magnetoresistive Effect

Design, Analysis and Simulation of a MEMS-Based Gyroscope with Differential Tunneling Magnetoresistance Sensing Structure

Acceleration Sensors: Sensing Mechanisms, Emerging Fabrication Strategies, Materials, and Applications

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