Research on the non-ideal dynamics of a dual-mass silicon micro-gyroscope

Yang, Bo; Wang, Xingjun; Hu, Di; Wu, Lei

doi:10.1007/s00542-015-2711-4

Cited by 8 publications

(3 citation statements)

References 8 publications

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“…Quite recently, researchers have conducted a lot of researches on tuning fork gyroscopes and developed various tuning fork micro-gyroscopes [53][54][55][56][57][58][59][60][61][62][63][64][65][66][67][68], such as the z-axis four-test-mass micro-gyroscope reported in 2016, as shown in Fig. 4(f) [67,68].…”

Section: Four-test-mass Tuning Fork Gyroscopementioning

confidence: 99%

MEMS and MOEMS Gyroscopes: A Review

Huang,

Yan,

Zhang

et al. 2023

Photonic Sens

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Micro-gyroscopes using micro-electro-mechanical system (MEMS) and micro-opto-electro-mechanical system (MOEMS) are the new-generation and recently well-developed gyroscopes produced by the combinations of the traditional gyroscope technology and MEMS/MOEMS technologies. According to the working principle and used materials, the newly-reported micro-gyroscopes in recent years include the silicon-based micromechanical vibratory gyroscope, hemispherical resonant gyroscope, piezoelectric vibratory gyroscope, suspended rotor gyroscope, microfluidic gyroscope, optical gyroscope, and atomic gyroscope. According to different sensitive structures, the silicon-based micromechanical vibratory gyroscope can also be divided into double frame type, tuning fork type, vibrating ring type, and nested ring type. For those micro-gyroscopes, in recent years, many emerging techniques are proposed and developed to enhance different aspects of performances, such as the sensitivity, angle random walk (ARW), bias instability (BI), and bandwidth. Therefore, this paper will firstly review the main performances and applications of those newly-developed MEMS/MOEMS gyroscopes, then comprehensively summarize and analyze the latest research progress of the micro-gyroscopes mentioned above, and finally discuss the future development trends of MEMS/MOEMS gyroscopes.

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Section: Four-test-mass Tuning Fork Gyroscopementioning

confidence: 99%

MEMS and MOEMS Gyroscopes: A Review

Huang,

Yan,

Zhang

et al. 2023

Photonic Sens

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“…Figure 1 shows the improved DDMG structure scheme [ 14 ]. The structural parameters under standard atmospheric pressure are shown in Table 1 .…”

Section: Device Descriptionmentioning

confidence: 99%

“…The lever supporting beams can suppress the arc locus at the end of the lever and ensure that the connecting point between the coupling crossbeam and sense coupling suspension beam has a straight trajectory along the sense direction, which is used to remove the rotational motion error of the proof mass in the sense mode.The sense frame and drive decoupled beam are optimized to suppress the mechanical coupling error in the improved DDMG. The simplified model of the sense frame in the drive mode is shown in Figure 2 [ 14 ]. The coupling crossbeam is simplified as a supporting point.…”

Section: Device Descriptionmentioning

confidence: 99%

Mechanical Coupling Error Suppression Technology for an Improved Decoupled Dual-Mass Micro-Gyroscope

Yang

Wang

Deng

et al. 2016

Sensors

Self Cite

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This paper presents technology for the suppression of the mechanical coupling errors for an improved decoupled dual-mass micro-gyroscope (DDMG). The improved micro-gyroscope structure decreases the moment arm of the drive decoupled torque, which benefits the suppression of the non-ideal decoupled error. Quadrature correction electrodes are added to eliminate the residual quadrature error. The structure principle and the quadrature error suppression means of the DDMG are described in detail. ANSYS software is used to simulate the micro-gyroscope structure to verify the mechanical coupling error suppression effect. Compared with the former structure, simulation results demonstrate that the rotational displacements of the sense frame in the improved structure are substantially suppressed in the drive mode. The improved DDMG structure chip is fabricated by the deep dry silicon on glass (DDSOG) process. The feedback control circuits with quadrature control loops are designed to suppress the residual mechanical coupling error. Finally, the system performance of the DDMG prototype is tested. Compared with the former DDMG, the quadrature error in the improved dual-mass micro-gyroscope is decreased 9.66-fold, and the offset error is decreased 6.36-fold. Compared with the open loop sense, the feedback control circuits with quadrature control loop decrease the bias drift by 20.59-fold and the scale factor non-linearity by 2.81-fold in the ±400°/s range.

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Research of a novel stereoscopic symmetrical quadruple hair gyroscope

Guo

Yang

2019

Microsyst Technol

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Research on the non-ideal dynamics of a dual-mass silicon micro-gyroscope

Cited by 8 publications

References 8 publications

MEMS and MOEMS Gyroscopes: A Review

MEMS and MOEMS Gyroscopes: A Review

Mechanical Coupling Error Suppression Technology for an Improved Decoupled Dual-Mass Micro-Gyroscope

Research of a novel stereoscopic symmetrical quadruple hair gyroscope

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