Residual stress in diamond-like carbon films: Role of growth conditions and ion irradiation

Podsvirov, O. A.; Karaseov, P. A.; Vinogradov, A. Ya.; Azarov, Alexander; Karasev, N. N.; Smirnov, Alexander; Titov, A.I.; Karabeshkin, K. V.

doi:10.1134/s1027451010020114

Cited by 11 publications

(3 citation statements)

References 12 publications

Supporting

Mentioning

Contrasting

Unclassified

Order By: Relevance

“…Forevacuum plasma electron sources meet Another drawback of this method is the difficulty in controlling the gas and vapor composition as they decompose, which leads to the presence of a broader range of gas products in coatings [53]. Besides, it is difficult to control the coating thickness and uniformity [73]. An industry-level plasma-chemical reactor is a complex and cumbersome installation that incorporates expensive power supply and vacuum evacuation systems [74].…”

Section: Plasma-enhanced Chemical Methodsmentioning

confidence: 99%

Electron-Beam Synthesis of Dielectric Coatings Using Forevacuum Plasma Electron Sources (Review)

et al. 2022

View full text Add to dashboard Cite

This is a review of current developments in the field of ion-plasma and beam methods of synthesis of protective and functional dielectric coatings. We give rationales for attractiveness and prospects of creating such coatings by electron-beam heating and following evaporation of dielectric targets. Forevacuum plasma electron sources, operating at elevated pressure values from units to hundreds of pascals, make it possible to exert the direct action of an electron beam on low-conductive materials. Electron-beam evaporation of aluminum oxide, boron, and silicon carbide targets is used to exemplify the particular features of electron-beam synthesis of such coatings and their parameters and characteristics.

show abstract

Section: Plasma-enhanced Chemical Methodsmentioning

confidence: 99%

Electron-Beam Synthesis of Dielectric Coatings Using Forevacuum Plasma Electron Sources (Review)

et al. 2022

View full text Add to dashboard Cite

show abstract

“…Due to its unique properties such as high hardness, low friction coefficient, good chemical inertness, and the optical transparency in a wide range of VIS-IR, DLC film has been used as protective coatings in many industrial fields [1]. However, high residual stress is the major drawback of DLC films for its wider practical application [2][3][4][5][6]. Immense amounts of concrete research have shown that the incorporation of metal elements, such as Mo, Cu, Al, Cr, and W, is one of the good methods to decrease the internal stress of DLC films [7][8][9][10][11][12].…”

Section: Introductionmentioning

confidence: 99%

Incorporated W Roles on Microstructure and Properties of W‐C:H Films by a Hybrid Linear Ion Beam Systems

Guo

Wang

2013

Journal of Nanomaterials

View full text Add to dashboard Cite

W-incorporated diamond-like carbon (W-C:H) films were fabricated by a hybrid beams system consisting of a DC magnetron sputtering and a linear ion source. The W concentration (1.08~31.74 at.%) in the film was controlled by varying the sputtering current. The cross-sectional topography, composition, and microstructure of the W-C:H films were investigated by SEM, XPS, TEM, and Raman spectroscopy. The mechanical and tribological properties of the films as a function of W concentration were evaluated by a stress-tester, nanoindentation, and ball-on-disk tribometer, respectively. The results showed that films mainly exhibited the feature of amorphous carbon when W concentration of the films was less than 4.38 at.%, where the incorporated W atoms would be bonded with C atoms and resulted in the formation ofWC1-xnanoparticles. The W-C:H film with 4.38 at.% W concentration showed a minimum value of residual compressive stress, a higher hardness, and better tribological properties. Beyond this W concentration range, both the residual stress and mechanical properties were deteriorated due to the growth of tungsten carbide nanoparticles in the carbon matrix.

show abstract

“…Resultados similares foram obtidos por variados trabalhos sob condições experimentais diferentes. 31,126,[162][163][164] Os resultados obtidos na determinação da razão de Poisson para estruturas SS e para estruturas TC coincidiram sendo o valor médio de ν = 0,17 ± 0.01. Esse ressultado mostra ser consistentes com resultados de trabalho como Sung-Jin Cho, et al 165 em que a razão de Poisson do filme DLC foi estimada usando técnicas combinadas de estudo de deformações morfológicas e indentação em filmes com um valor ν = 0,22 ± 0,33.…”

Section: Comentários Sobre Os Resultadosunclassified

Determinação de propriedades mecânicas de filmes de DLC (Diamond-Like carbon) por meio de estruturas formadas por delaminação espontânea

Álvarez

View full text Add to dashboard Cite

Numerous technological applications such as electronics, optics, transportation and other industries, require the synthesis of small parts that can be covered by a film at a given moment of their construction, thus improving the characteristics of these parts for specific applications. In this sense, films are used to optimize one or more properties of the substrate on which it is deposited, or even to provide it with new physical or chemical properties. The delamination of films from their substrate is generally an undesirable phenomenon in different types of applications, for example, a large number of failures in integrated circuits result, in large part, from the mechanical behavior of the film-substrate (delamination, fractures, etc.). However, the mechanical properties of the films are tested by different conventional methods which may not be suitable for films with a thickness of less than 1 µm. As an example, among the different experimental techniques developed to study the mechanical properties of films, as well as to study the fracture characteristics of the film-substrate interface, nanoindentation tests are great for such studies, although these techniques are limited as they cannot exceed 10 − 30% of the film thickness. This work proposes, As an alternative to such limitations, new approaches that use the film's own structural deformations due to delamination to develop techniques that allow characterizing the mechanical properties of the material from which this film is made, as well as the film-substrate interface, which could be very useful in different technological applications related to microelectronics, microfluidics and, in general, NEMS and MEMS devices (Nano and Micro-Electro-Mechanical-Systems). This work initially presents analyzes performed on Straight Sides (SS) deformations. For that, deposition experiments were carried out on lithographed Poly(methyl methacrylate) (PMMA), creating areas whose lengths are much greater than their width, showing necessary experimental conditions to obtain well-formed SS-type structures which were studied through different models. Soon, theoretical models for more complex structures called Telephone Cord (TC) are presented, thus, with the study of experimental data through these models, mechanical properties of DLC films were obtained, as done for SS structures.

show abstract

Residual stress in diamond-like carbon films: Role of growth conditions and ion irradiation

Cited by 11 publications

References 12 publications

Electron-Beam Synthesis of Dielectric Coatings Using Forevacuum Plasma Electron Sources (Review)

Electron-Beam Synthesis of Dielectric Coatings Using Forevacuum Plasma Electron Sources (Review)

Incorporated W Roles on Microstructure and Properties of W‐C:H Films by a Hybrid Linear Ion Beam Systems

Determinação de propriedades mecânicas de filmes de DLC (Diamond-Like carbon) por meio de estruturas formadas por delaminação espontânea

Contact Info

Product

Resources

About