1995
DOI: 10.1016/0257-8972(95)02581-2
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Residual stresses in PVD hard coatings

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Cited by 185 publications
(57 citation statements)
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“…The different nature of failures observed in the inverted images of craters developed in the course of erosion resistance test results probably from differences of the residual stresses in particular coat- ings. The residual stresses occurring in coatings are composed of the stress developed due to coating growth and from the thermal stress resulting from the difference of the thermal expansion coefficients of substrate and coating [24][25][26][27]. One can judge that in case of the Ti + TiN coatings, reduction of stresses occurs along with the deposition temperature rise, which is demonstrated by lowering of erosion resistance of coatings obtained at elevated temperatures.…”
Section: Discussion Of the Investigation Resultsmentioning
confidence: 97%
“…The different nature of failures observed in the inverted images of craters developed in the course of erosion resistance test results probably from differences of the residual stresses in particular coat- ings. The residual stresses occurring in coatings are composed of the stress developed due to coating growth and from the thermal stress resulting from the difference of the thermal expansion coefficients of substrate and coating [24][25][26][27]. One can judge that in case of the Ti + TiN coatings, reduction of stresses occurs along with the deposition temperature rise, which is demonstrated by lowering of erosion resistance of coatings obtained at elevated temperatures.…”
Section: Discussion Of the Investigation Resultsmentioning
confidence: 97%
“…In conventional magnetron sputtering, a negative substrate bias voltage is usually applied to improve the structure densification of the deposited coatings, which however inevitably results in high residual compressive stresses in the coatings, e.g. as being measured in this study and shown in literature [24,42,[51][52][53] . Such residual stresses are known to be deteriorating to the adhesion property of hard coatings, especially for those to be used under severe tribological loading conditions.…”
Section: Effect Of Hipims On Coating Structurementioning
confidence: 96%
“…[62,65] Increased diffusivities during film annealing commonly lead to defect annihilation and atomic re-arrangement resulting in lower stresses. [68,83] Since structural defects act as obstacles for dislocation motion, a direct relationship between defect density and hardness is expected. [68] Thus, lattice parameter, diffraction peak widths, and consequently the hardness of stoichiometric binary nitride and carbide layers typically decreases during annealing.…”
Section: Two-dimensional Nanostructure Of Tib 24mentioning
confidence: 99%