2020
DOI: 10.1088/1361-6528/ab5eb7
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Resistive switching of silicon-silver thin film devices in flexible substrates

Abstract: Novel applications for memory devices demand nanoscale flexible structures. In particular, resistive switching (RS) devices are promising candidates for wearable and implantable technologies. Here, the Pt/Si/Ag/TiW metal–insulator–metal structure was fabricated and characterized on top of flexible substrates using a straightforward microfabrication process. We also showed that these substrates are compatible with sputtering deposition. RS was successfully achieved using both commercial cellulose cleanroom pape… Show more

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Cited by 6 publications
(1 citation statement)
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“…A body expands or contracts every time it undergoes temperature changes without any phase transformation. This is of particular importance in microfabrication, since the different materials can be grown at distinct temperatures, T dep , or several patterning steps or annealing treatments may require or impose changes in temperature [38,39]. After these steps at high temperature, the materials are brought back to the room temperature, T room .…”
Section: Thermoelastic Strainmentioning
confidence: 99%
“…A body expands or contracts every time it undergoes temperature changes without any phase transformation. This is of particular importance in microfabrication, since the different materials can be grown at distinct temperatures, T dep , or several patterning steps or annealing treatments may require or impose changes in temperature [38,39]. After these steps at high temperature, the materials are brought back to the room temperature, T room .…”
Section: Thermoelastic Strainmentioning
confidence: 99%