1967
DOI: 10.1149/1.2426562
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Resistivity Inhomogeneities in Silicon Crystals

Abstract: The extent of small‐scale radial resistivity inhomogeneity in several n‐type silicon crystals has been quantitatively determined with high spatial resolution by the spreading resistance resistivity measurement technique. Typical results for Czochralski, float‐zone refined, crucible‐less, web‐grown and vapor‐deposited epitaxial silicon are given, showing that appreciable nonuniformity in local resistivity exists in many crystals. The usefulness of the spreading resistance technique in rapid evaluation of the de… Show more

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Cited by 33 publications
(6 citation statements)
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“…[120,[154][155][156][157][158][159][160][161][162][163] Furthermore, it found broad application in electrochemistry, [164,165] biochemistry, [166] and semiconductor technology. [167][168][169] A comprehensive review of experimental studies is provided in ref. [152].…”
Section: Figurementioning
confidence: 99%
“…[120,[154][155][156][157][158][159][160][161][162][163] Furthermore, it found broad application in electrochemistry, [164,165] biochemistry, [166] and semiconductor technology. [167][168][169] A comprehensive review of experimental studies is provided in ref. [152].…”
Section: Figurementioning
confidence: 99%
“…When comparing the area of one mesoplasma, in which the energy of the secondary breakdown of the p-n junction is localised during its breakdown, with the area of the rectifying clement as mm2 and 6~ lo3 mm2 respectively, it is quite understandable why such a great attention is paid to the study of the homogeneit y of semiconductor materials. Earlier studies of the distribution of resistivity over the cross-section of an ingot [4,5] show a considerable doping inhomogeneity of the monocrystal. Starting from entirely original measurements of the lifetime of minority charge carriers in high-resistivity p-type silicon, Zinimermann [6] pointed to the distribution inhoniogeneity not only of the doping material, but also of deep doping levels.…”
Section: Introductionmentioning
confidence: 99%
“…Microscopic dopant variations are generated in this way along the axis of the rod. They are n o r m a l l y determined by means of a resistivity measurement with high local resolution (1,2).…”
mentioning
confidence: 99%