Resolution limit due to thermal effects in low-temperature scanning electron microscopy

Pavlicek, H.; Freytag, L.; Seifert, H.; Huebener, R. P.

doi:10.1007/bf00681443

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2014

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Cited by 14 publications

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“…These theoretical results about the increase of the spatial resolution of LTSEM based on the thermal skin effect have been well confirmed by experiment [8]. Subsequently, these ideas were widely and successfully applied to high-temperature superconductors.…”

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confidence: 57%

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John Clem–Theoretical Guide to Experimentalists

Huebener

2014

J Supercond Nov Magn

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confidence: 57%

“…The underlying physics is referred to as thermal skin effect. The dynamic thermal healing length η is given by [7,8]:…”

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confidence: 99%

John Clem–Theoretical Guide to Experimentalists

Huebener

2014

J Supercond Nov Magn

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“…Clem and Huebener (1980) determined the temperature field in a low-temperature superconducting microbridge resulting from the absorption of an LTSEM electron beam considering the finite width of the microbridge. Pavlicek et al (1984) investigated the effect of Contributed by the Heat Transfer Division and presented at the 3rd ASME/ JSME Joint Thermal Engineering Conference, Reno, Nevada, March 17-22, 1991. Manuscript received by the Heat Transfer Division January 3, 1991; revision received June 30, 1991.…”

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confidence: 99%

Thermal Analysis of Electron-Beam Absorption in Low-Temperature Superconducting Films

Flik

Goodson

1992

Journal of Heat Transfer

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The absorption of an electron beam in a superconducting microbridge reduces its critical current, the maximum d-c electric current it can carry without resistance. A two-dimensional heat conduction analysis determines numerically the temperature field in the film caused by electron-beam heating, considering the nonlinear thermal boundary resistance between film and substrate. The method of Intrinsic Thermal Stability yields the critical current for this temperature field. The critical current predictions agree with experimental data from low-temperature scanning electron microscopy (LTSEM) with superconducting lead microbridges. The method developed in this study permits the quantitative prediction of LTSEM experiments, enhancing the value of this technique for the local characterization of superconducting films.

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