2014
DOI: 10.1364/ao.53.005092
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Resolution limits of extrinsic Fabry–Perot interferometric displacement sensors utilizing wavelength scanning interrogation

Abstract: The factors limiting the resolution of displacement sensors based on the extrinsic Fabry-Perot interferometer were studied. An analytical model giving the dependency of extrinsic Fabry-Perot interferometric (EFPI) resolution on the parameters of an optical setup and a sensor interrogator was developed. The proposed model enables one to either estimate the limit of possible resolution achievable with a given setup, or derive the requirements for optical elements and/or a sensor interrogator necessary for attain… Show more

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Cited by 36 publications
(49 citation statements)
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“…The analysis of the influence of these parameters on the resultant sensor resolution is complicated since this influence depends on the properties of the interrogator, such as Λ и Δ and on the parameters of the optical scheme. Analytical expressions, relating the quantity σ Lr with the optical setup parameters were obtained by the authors in [7]. Experiments, supporting the developed model were performed, demonstrating very good correspondence with the theory.…”
Section: Extrinsic Fabry-perot Interferometermentioning
confidence: 53%
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“…The analysis of the influence of these parameters on the resultant sensor resolution is complicated since this influence depends on the properties of the interrogator, such as Λ и Δ and on the parameters of the optical scheme. Analytical expressions, relating the quantity σ Lr with the optical setup parameters were obtained by the authors in [7]. Experiments, supporting the developed model were performed, demonstrating very good correspondence with the theory.…”
Section: Extrinsic Fabry-perot Interferometermentioning
confidence: 53%
“…Second approach demonstrated subnanometers resolutions of OPD measuring, high absolute accuracies and large dynamic measurement range [3]- [6]. The best examples of attained OPD resolutions, were attained using wavelength scanning approach, and equaled 10 pm [7].…”
Section: Extrinsic Fabry-perot Interferometermentioning
confidence: 95%
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“…A calibration curve relating the interferometer spectrum fringe visibility with the refractive index of the medium at the right side of the plate is shown in figure 2. The curve was calculated analytically with the use of the Gaussian beam formalism, applied to the Fabry-Perot cavity 9 . The cavity parameters were substituted the same as the practical (L 0 =240 μm, silicon inside the cavity).…”
Section: Methodsmentioning
confidence: 99%