Resonant cavity modes of a bounded helicon discharge

Chi, Kyeong-Koo; Sheridan, T. E.; Boswell, Roderick

doi:10.1088/0963-0252/8/3/312

Cited by 79 publications

(98 citation statements)

References 22 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…definite peak at z = 12.5 cm observed in the wave fields for case 5 suggests that the waves have reached this back plate, and that some type of wave reflection ͑leading to interference effects͒ could be occurring, 32 although this has presently not yet been investigated further.…”

Section: -5mentioning

confidence: 93%

Plasma control by modification of helicon wave propagation in low magnetic fields

Lafleur¹,

Charles²,

Boswell³

2010

Physics of Plasmas

View full text Add to dashboard Cite

By making use of nonuniform magnetic fields, it is shown experimentally that control of helicon wave propagation can be achieved in a low pressure ͑0.08 Pa͒ expanding plasma. The m = 1 helicon waves are formed during a direct capacitive to wave mode transition that occurs in a low diverging magnetic field ͑B 0 Ͻ 3 mT͒. In this initial configuration, waves are prevented from reaching the downstream region, but slight modifications to the magnetic field allows the axial distance over which waves can propagate to be controlled. By changing the effective propagation distance in this way, significant modification of the density and plasma potential profiles can be achieved, showing that the rf power deposition can be spatially controlled as well. Critical to the modification of the wave propagation behavior is the magnetic field strength ͑and geometry͒ near the exit of the plasma source region, which gives electron cyclotron frequencies close to the wave frequency of 13.56 MHz.

show abstract

Section: -5mentioning

confidence: 93%

Plasma control by modification of helicon wave propagation in low magnetic fields

Lafleur¹,

Charles²,

Boswell³

2010

Physics of Plasmas

View full text Add to dashboard Cite

show abstract

“…Assuming geometrical symmetry for −13 cmഛ r ഛ 0 cm leads to a "double hump" density profile which has been previously measured and is a common feature of a high density plasma coupling mode. 18,19 An estimation of the plasma density upstream of the double layer gives a few 10 11 cm −3 .…”

Section: ͑1͒mentioning

confidence: 99%

Xenon ion beam characterization in a helicon double layer thruster

Charles

Boswell

Lieberman

2006

Applied Physics Letters

103

View full text Add to dashboard Cite

A current-free electric double layer is created in a helicon double layer thruster operating with xenon and compared to a recently developed theory. The Xe+ ion beam formed by acceleration through the potential drop of the double layer is characterized radially using an electrostatic ion energy analyzer. For operating conditions of 500W rf power, 0.07mTorr gas pressure, and a maximum magnetic field of 125G, the measured beam velocity is about 6kms−1, the beam area is about 150cm2, and the measured beam divergence is less than 6°.

show abstract

“…The plasma source is made of a 31-cm long, 13.7-cm diameter Pyrex glass tube surrounded by a 18-cm long double saddle antenna (its configuration has been detailed in Chi et al [20]) operating at a constant RF power of 310 Watts at 13.56 MHz, for which a L-type network is used to match the plasma discharge to a RF power supply. A turbo/primary pumping system is used to obtain a base pressure of 3×10 −6 Torr in the reactor monitored with an ion gauge.…”

Section: Methodsmentioning

confidence: 99%

Density Measurements in Low Pressure, Weakly Magnetized, RF Plasmas: Experimental Verification of the Sheath Expansion Effect

2017

View full text Add to dashboard Cite

This experimental study shows the validity of Sheridan's method in determining plasma density in low pressure, weakly magnetized, RF plasmas using ion saturation current data measured by a planar Langmuir probe. The ion density derived from Sheridan's method which takes into account the sheath expansion around the negatively biased probe tip, presents a good consistency with the electron density measured by a cylindrical RF-compensated Langmuir probe using the Druyvesteyn theory. The ion density obtained from the simplified method which neglects the sheath expansion effect, overestimates the true density magnitude, e.g., by a factor of 3 to 12 for the present experiment.

show abstract

Resonant cavity modes of a bounded helicon discharge

Cited by 79 publications

References 22 publications

Plasma control by modification of helicon wave propagation in low magnetic fields

Plasma control by modification of helicon wave propagation in low magnetic fields

Xenon ion beam characterization in a helicon double layer thruster

Density Measurements in Low Pressure, Weakly Magnetized, RF Plasmas: Experimental Verification of the Sheath Expansion Effect

Contact Info

Product

Resources

About