Resonant, high voltage, high power supply for atmospheric pressure plasma sources

Teschke, M.; Korzec, D.; Finanţu-Dinu, E.G.; Engemann, J.; Kennel, Ralph

doi:10.1109/pesc.2004.1355858

Cited by 12 publications

(5 citation statements)

References 7 publications

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“…Rectangular voltage pulses were used in order to have only one current pulse every half period of the applied voltage, for easier synchronization of the ICCD pictures and to control the behaviour of the excited atoms. A resonant power supply developed especially for operation with DBDs was used to provide sinusoidal excitation with a voltage ranging from 0.5 to 1.5 kV [24]. The resonance frequency was established automatically in this case according to the impedance of the output circuitry.…”

Section: High Voltage Supplymentioning

confidence: 99%

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Characterization of a surface barrier discharge in helium

Korzec

Finanţu-Dinu

Teschke

et al. 2006

Plasma Sources Sci. Technol.

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A surface barrier discharge (SBD) operated with helium is investigated in a pressure range from 50 mbar to 1 bar and a gas flow of up to 400 sccm. A sinusoidal or pulsed excitation signal with a voltage amplitude of up to 1 kV and frequency in the range of 4 to 8 kHz is applied. Time resolved and time averaged ICCD pictures of the discharge are analysed. The temporally and spatially resolved concentrations of metastable excited species are determined using diode laser atomic absorption spectroscopy. The transition 2 3 S → 3 3 P • , absorbing the light of wavelength 388.975 nm, is used for the He(2 3 S) diagnostics. The absorption of the transition from the resonant level (2 1 P • → 3 1 D) at 667.999 nm is shown for comparison. Parallel to the absorption, the total light emission and the electrode voltage and current are traced. The role of the metastable excited species in sustaining a SBD in helium is discussed.

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Section: High Voltage Supplymentioning

confidence: 99%

“…Sinusoidal, resonant excitation is frequently used for industrial DBD applications due to its high efficiency [24]. The total light emission of the SBD excited by such a signal is displayed in figure 22.…”

Section: Sinusoidal Excitationmentioning

confidence: 99%

Characterization of a surface barrier discharge in helium

Korzec

Finanţu-Dinu

Teschke

et al. 2006

Plasma Sources Sci. Technol.

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“…With the absence of a transformer, the voltage gain of the power supply is achieved only by the means of the LC resonant tank circuit [30], [31]. However, for an ordinary LC circuit, a sufficiently high voltage gain cannot be achieved unless the power supply is fed by the single-or three-phase utility supply [32].…”

mentioning

confidence: 99%

Analysis and Implementation of Transformerless LCL Resonant Power Supply for Ozone Generation

Amjad

Salam

Facta

et al. 2013

IEEE Trans. Power Electron.

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Abstract-This paper describes the analysis and design of an LCL resonant power supply for ozone generation. The main advantage of the proposed topology is the absence of high-voltage transformer; the high voltage gain is achievable by means of doubleresonance phenomena. Furthermore, the bandwidth is wider than the ordinary LC and its phase difference is constant over specific frequency range; as a result, an open-loop operation can be implemented. The complete analysis and design procedure of the power supply is presented. The design procedure is verified by implementing the power supply to drive a dielectric barrier discharge prototype ozone chamber. The hardware results are found to be in close agreement with simulation and thus justify the validity of the design procedures. The proposed circuit is suitable for portable ozone power supply fed by low-voltage source such as battery or photovoltaic module.Index Terms-Dielectric barrier discharge (DBD), full-bridge inverter, high-voltage power supply, LCL resonant circuit, ozone generation.

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“…The arrays of atmospheric pressure plasma jets (APPJs) are subject of a number of papers [6,[10][11][12][13]. Such array sources powered with frequency in the kHz range, based on dielectric barrier discharge (DBD) are described in [14,15].…”

Section: Introductionmentioning

confidence: 99%

Multi-Device Piezoelectric Direct Discharge for Large Area Plasma Treatment

Korzec¹,

Hoppenthaler²,

Shestakov³

et al. 2021

Plasma

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The piezoelectric cold plasma generators (PCPG) allow for production of the piezoelectric direct discharge (PDD), which is a kind of cold atmospheric pressure plasma (APP). The subjects of this study are different arrays of PCPGs for large-area treatment of planar substrates. Two limiting factors are crucial for design of such arrays: (i) the parasitic coupling between PCPGs resulting in minimum allowed distance between devices, and (ii) the homogeneity of large area treatment, requiring an overlap of the activation zones resulting from each PCPG. The first limitation is investigated by the use of electric measurements. The minimum distance for operation of 4 cm between two PCPGs is determined by measurement of the energy coupling from an active PCPG to a passive one. The capacitive probe is used to evaluate the interference between signals generated by two neighboring PCPGs. The second limitation is examined by activation image recording (AIR). Two application examples illustrate the compromising these two limiting factors: the treatment of large area planar substrates by PCPG array, and the pretreatment of silicon wafers with an array of PCPG driven dielectric barrier discharges (DBD).

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Resonant, high voltage, high power supply for atmospheric pressure plasma sources

Cited by 12 publications

References 7 publications

Characterization of a surface barrier discharge in helium

Characterization of a surface barrier discharge in helium

Analysis and Implementation of Transformerless LCL Resonant Power Supply for Ozone Generation

Multi-Device Piezoelectric Direct Discharge for Large Area Plasma Treatment

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