Resonant tunneling displacement transducer

Vatannia, S.; Schiano, J.L.; Gidenblat, G.; Ginsberg, Mark D.

doi:10.1109/16.701497

Cited by 3 publications

(1 citation statement)

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“…In principle, one cannot exclude a possibility of manufacturing a device with relatively mobile tunneling electrodes that will remain for a long time in the tunneling mode without the feedback. However, in this case, there are problems with the particles being adsorbed on the electrodes, which can give a "false signal" corresponding to some displacement of the electrodes [8]. Whether it is possible to make such electrodes a little mobile from each other and, at the same time, retain the mode of the current transfer, the resolution and stability in or- In a number of works [9], [10], cold emission current was used to measure small displacement in high-sensitivity pressure sensors.…”

Section: Introductionmentioning

confidence: 96%

High-Sensitivity Accelerometer Based on Cold Emission Principle

et al. 2004

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A possibility for fabrication of a high-sensitivity accelerometer is considered. The linear acceleration of a sensor causes displacement of the proof mass electrode. The displacement detector is based on a strong dependence of the tunneling or cold emission current on the gap between the electrodes. The geometry of the electrodes that provides the best sensitivity is determined. The accelerometer with tunneling-emission electrodes is fabricated. At frequencies up to 5 kHz the resolution reaches 10 4 g Hz 1 2 in the tunneling mode and 10 3 g Hz 1 2 in the emission mode.

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Section: Introductionmentioning

confidence: 96%