“…With the research of the third-generation semiconductors, solar-blind ultraviolet photodetectors have attracted great attention due to their indispensable characteristics in the military field, environmental monitoring, medical imaging, security communication, high-temperature event monitoring, space observation, antiterrorism, security, and self-organizing network communication. − Previous studies have shown that wide band gap semiconductors such as ZnO (3.37 eV) and GaN (3.4 eV) are promising candidates for constructing ultraviolet photodetectors with outstanding performance. − However, for the absorption of solar-blind ultraviolet light, the band gap of the semiconductor material needs to be greater than 4.4 eV . As a new type of direct wide band gap semiconductor, Ga 2 O 3 has a band gap of about 4.9 eV, which is considered to be a suitable material for solar-blind ultraviolet photodetectors. , Ga 2 O 3 also has many advantages such as chemical and thermal stability, high saturated electron mobility, low growth cost, high breakdown electric field, low dielectric constant, and so on.…”