The objective of this study is to quantify the clinical accuracy of the Cyberknife Xsight Lung Tracking System (XLTS) in our center and calculate the PTV margin of XLTS treated lung tumors. Data from the treatment log files of 22 lung cancer patients treated with the CyberKnife XLTS were analyzed and the PTV margin was calculated. Segmentation, deformation, correlation, prediction and targeting errors were calculated from the log files of XLTS treatments. Two different methods were used to calculate anisotropic treatment margin. The relationships between tumor motion ranges and the correlation and prediction errors were also analyzed. Based on our estimation of a 4 mm global margin, 95% coverage in the S-I direction and 100% coverage in the L-R and A-P directions were obtained. Strong correlations between tumor motion range and the standard deviation (SD) of correlation and prediction errors were also found. Tumor position motion caused by respiration can be compensated using the Xsight Lung Tracking System. We found total tracking errors to be less than 4 mm in all three directions. This result could provide a reference for the selection of PTV margin for treatment with the CyberKnife XLTS.