2022 IEEE International Reliability Physics Symposium (IRPS) 2022
DOI: 10.1109/irps48227.2022.9764476
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Revealing stresses for plasma induced damage detection in thick oxides

Daniel Beckmeier
1
,
Jiankui Hao
2
,
Jake Choi
3
et al.
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Cited by 3 publications
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Plasma Induced Damage Test Methodology applied to a 3D Vertical NAND Memory Technology

Beckmeier,
LaRow,
Kerber
2023
2023 IEEE International Integrated Reliability Workshop (IIRW)
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Plasma Induced Damage Test Methodology applied to a 3D Vertical NAND Memory Technology

Beckmeier,
LaRow,
Kerber
2023
2023 IEEE International Integrated Reliability Workshop (IIRW)
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Restrictive antenna rules limiting PID degradation for MOS transistors with connected MIM-capacitors

Martin,
Pham,
Nielen
et al. 2023
2023 IEEE International Integrated Reliability Workshop (IIRW)
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TDDB Lifetime Reduction From Charging Damage in a 3D Vertical NAND Memory Technology

Beckmeier,
LaRow,
Kerber
2024
IEEE Trans. Device Mater. Relib.
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