“…42 Demonstrated applications included improved water purification, 10,43 controlled mechanical 16,17,36,40,44−46 and electrical properties, 23,30,38,39,47 templating for nanofabrication, 11,18,48 and imaging contrast enhancement. 9,49,50 Mechanistic studies are imperative for an improved understanding of the SIS process and its better integration into real-world systems. Currently, the great majority of such studies were dedicated to trimethyl aluminum (TMA), 7,8,12,13,15,29 which has been probed by microgravimetry, infrared (IR) spectroscopy, ellipsometry, electron microscopy (EM), time-of-flight-secondary ion mass spectrometry (ToF-SIMS), X-ray, and other methods, with models developed to predict and understand diffusion and growth as a function of process parameters.…”