The purpose of this work is to fabricate a Ni/GO-Fe 3 O 4 /n-Si heterojunction device using Mott-Schottky plots and to study the capacitance-voltage/conductance/series resistance characteristics of the device as a function of temperature. We analyzed temperature dependent capacitance-voltage measurements for the Ni/GO-Fe 3 O 4 /n-Si device in the temperature range from 80 to 360 K. Temperature dependent electrical measurements have been performed at a fixed frequency of 500 kHz and frequency dependent ones have been carried out at room temperature. In the reverse bias capacitance-voltage characteristics figure, it has been determined that the barrier height is 1.73 eV (80 K) and 1.50 eV (360 K) with 20 K steps. The impedance analysis measurements have been performed in the reverse and forward biases. The experimental results have shown that the values of capacitance, conductance, interface states and series resistance R s depend on both bias voltage and temperature.