2023
DOI: 10.1088/1674-1056/ac8735
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Reverse gate leakage mechanism of AlGaN/GaN HEMTs with Au-free gate

Abstract: The reverse gate leakage mechanism of W-gate and TiN-gate AlGaN/GaN HEMTs with N2 plasma surface treatment is investigated by using current-voltage (I-V), capacitance-voltage (C-V) characteristics and theoretical calculation analysis. It is found that the main reverse gate leakage mechanism of both devices is the trap-assisted tunneling (TAT) mechanism at the entire reverse bias region (-30V - 0V). To the best of our knowledge, this is the first time that the analysis of the reverse gate leakage mechanism of W… Show more

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Cited by 2 publications
(1 citation statement)
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“…[1][2][3] Notably, the advantageous tolerance of GaN-based devices to radiation damage has drawn special attention for their potential application in the aerospace sector. [4][5][6] Additionally, GaN-based devices are utilized in the aerospace industry due to their superior radiation damage resistance in a radiation environment. [7,8] In previous studies, most radiation effect research on GaNbased devices focused on performance degradation from the device's perspective.…”
Section: Introductionmentioning
confidence: 99%
“…[1][2][3] Notably, the advantageous tolerance of GaN-based devices to radiation damage has drawn special attention for their potential application in the aerospace sector. [4][5][6] Additionally, GaN-based devices are utilized in the aerospace industry due to their superior radiation damage resistance in a radiation environment. [7,8] In previous studies, most radiation effect research on GaNbased devices focused on performance degradation from the device's perspective.…”
Section: Introductionmentioning
confidence: 99%