Review Article: Review of electrohydrodynamical ion sources and their applications to focused ion beam technology

Giérak, J.; Mazarov, Paul; Bruchhaus, L.; Jede, R.; Bischoff, L.

doi:10.1116/1.5047150

Cited by 15 publications

(9 citation statements)

References 17 publications

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“…Therefore, IBL can lead to a variety of patterns of desired dimensions, including sub-10 nm lines [ 82 ]. More details on IBL can be further found in the literature [ 30 , 85 ].…”

Section: Top–down Lithographic Methodologiesmentioning

confidence: 99%

“…These methodologies can be used separately [ 23 , 24 , 25 , 26 ] or combined [ 27 , 28 ]. The top–down methodology is breaking down the material system by removing molecules or atoms using electrons [ 29 ], ions [ 30 ], protons [ 31 ], light [ 32 ], etc. and leaving a clearer pattern on the surface of the material ( Figure 1 a), while the bottom–up methodology is based on building different blocks or stacking molecules on top of each other ( Figure 1 b).…”

Section: Introductionmentioning

confidence: 99%

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Multifunctional Structured Platforms: From Patterning of Polymer-Based Films to Their Subsequent Filling with Various Nanomaterials

Handrea-Dragan

Botiz

2021

Polymers

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There is an astonishing number of optoelectronic, photonic, biological, sensing, or storage media devices, just to name a few, that rely on a variety of extraordinary periodic surface relief miniaturized patterns fabricated on polymer-covered rigid or flexible substrates. Even more extraordinary is that these surface relief patterns can be further filled, in a more or less ordered fashion, with various functional nanomaterials and thus can lead to the realization of more complex structured architectures. These architectures can serve as multifunctional platforms for the design and the development of a multitude of novel, better performing nanotechnological applications. In this work, we aim to provide an extensive overview on how multifunctional structured platforms can be fabricated by outlining not only the main polymer patterning methodologies but also by emphasizing various deposition methods that can guide different structures of functional nanomaterials into periodic surface relief patterns. Our aim is to provide the readers with a toolbox of the most suitable patterning and deposition methodologies that could be easily identified and further combined when the fabrication of novel structured platforms exhibiting interesting properties is targeted.

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“…Therefore, IBL can lead to a variety of patterns of desired dimensions, including sub-10 nm lines [ 82 ]. More details on IBL can be further found in the literature [ 30 , 85 ].…”

Section: Top–down Lithographic Methodologiesmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Multifunctional Structured Platforms: From Patterning of Polymer-Based Films to Their Subsequent Filling with Various Nanomaterials

Handrea-Dragan

Botiz

2021

Polymers

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“…Over the last 15 years, several new FIB sources have been introduced offering a wider choice of ion species and beam parameters (Smith et al, 2014;Gierak et al, 2018). The ion microscope producing the smallest spot size for applications requiring the highest resolution is the helium ion microscope, which uses a specialized gas field ionization source (GFIS) (Ward et al, 2006).…”

Section: Introductionmentioning

confidence: 99%

Fabrication of Specimens for Atom Probe Tomography using a Combined Gallium and Neon Focused Ion Beam Milling Approach

Allen¹,

Blanchard²,

Lake³

et al. 2023

Preprint

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We demonstrate a new focused ion beam sample preparation method for atom probe tomography. The key aspect of the new method is that we use a neon ion beam for the final tip shaping after conventional annulus milling using gallium ions. This dual-ion approach combines the benefits of the faster milling capability of the higher current gallium ion beam with the chemically inert and higher precision milling capability of the noble gas neon ion beam. Using a titanium-aluminum alloy and a layered aluminum/aluminum oxide material as test cases, we show that atom probe tips prepared using the combined gallium and neon ion approach are free from the gallium contamination that typically frustrates composition analysis of these materials due to implantation, diffusion, and embrittlement effects. We propose that by using a focused ion beam from a noble gas species, such as the neon ions demonstrated here, atom probe tomography can be more reliably performed on a larger range of materials than is currently possible using conventional techniques.

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“…New FIB technology has been developed, incorporating LM ion sources other than Ga [11,12]. These include Au and Si, as well as gas-based sources, such as Ne, Ar, and Xe [13].…”

mentioning

confidence: 99%

Deciphering Liquid Metal Embrittlement and Altered FIB Damage Microstructures on Aluminum

Lang

Hattar

Richter³

et al. 2021

Microsc Microanal

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Review Article: Review of electrohydrodynamical ion sources and their applications to focused ion beam technology

Cited by 15 publications

References 17 publications

Multifunctional Structured Platforms: From Patterning of Polymer-Based Films to Their Subsequent Filling with Various Nanomaterials

Multifunctional Structured Platforms: From Patterning of Polymer-Based Films to Their Subsequent Filling with Various Nanomaterials

Fabrication of Specimens for Atom Probe Tomography using a Combined Gallium and Neon Focused Ion Beam Milling Approach

Deciphering Liquid Metal Embrittlement and Altered FIB Damage Microstructures on Aluminum

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