Review: MEMS sensors for flow separation detection

Abbas, Zaheer; Mansoor, Mohtashim; Habib, Muzaffar; Mehmood, Zahid

doi:10.1007/s00542-023-05513-x

Cited by 3 publications

(1 citation statement)

References 109 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Recent advancements in smart and portable systems demand miniaturized systems offering numerous functionality such as high speed, high resolution, ultra efficiency in performance, and most importantly, all these are achieved at the lowest possible cost [1][2][3][4][5]. MEMSs have brought revolutionary changes in the design of efficient systems, whether it is in the field of communication, sensing [6,7], biomedicals [8][9][10], safety instruments [11], food units [12], car manufacturing units [13,14], or sensor technologies. MEMS switches SMA-based MEMS switches, leveraging the unique properties of Shape Memory Alloys (SMAs), represent an innovative approach to switch technology [16].…”

Section: Introductionmentioning

confidence: 99%

MEMS Switch Realities: Addressing Challenges and Pioneering Solutions

Kurmendra,

Agarwal

2024

Micromachines

View full text Add to dashboard Cite

Micro-Electro-Mechanical System (MEMS) switches have emerged as pivotal components in the realm of miniature electronic devices, promising unprecedented advancements in size, power consumption, and versatility. This literature review paper meticulously examines the key issues and challenges encountered in the development and application of MEMS switches. The comprehensive survey encompasses critical aspects such as material selection, fabrication intricacies, performance metrics including switching time and reliability, and the impact of these switches on diverse technological domains. The review critically analyzes the influence of design parameters, actuation mechanisms, and material properties on the performance of MEMS switches. Additionally, it explores recent advancements, breakthroughs, and innovative solutions proposed by researchers to address these challenges. The synthesis of the existing literature not only elucidates the current state of MEMS switch technology but also paves the way for future research avenues. The findings presented herein serve as a valuable resource for researchers, engineers, and technologists engaged in advancing MEMS switch technology, offering insights into the current landscape and guiding future endeavors in this rapidly evolving field.

show abstract

Section: Introductionmentioning

confidence: 99%

MEMS Switch Realities: Addressing Challenges and Pioneering Solutions

Kurmendra,

Agarwal

2024

Micromachines

View full text Add to dashboard Cite

show abstract

Pressure-insensitive magnetic shear force sensor with pillar structure for versatile application

Kim,

Jeon

et al. 2024

Applied Materials Today

View full text Add to dashboard Cite

Ceramics for Microelectromechanical Systems Applications: A Review

Fallah Nia,

Kouki

2024

Micromachines

View full text Add to dashboard Cite

A comprehensive review of the application of different ceramics for MEMS devices is presented. Main ceramics materials used for MEMS systems and devices including alumina, zirconia, aluminum Nitride, Silicon Nitride, and LTCC are introduced. Conventional and new methods of fabricating each material are explained based on the literature, along with the advantages of the new approaches, mainly additive manufacturing, i.e., 3D-printing technologies. Various manufacturing processes with relevant sub-techniques are detailed and the ones that are more suitable to have an application for MEMS devices are highlighted with their properties. In the main body of this paper, each material with its application for MEMS is categorized and explained. The majority of works are within three main classifications, including the following: (i) using ceramics as a substrate for MEMS devices to be mounted or fabricated on top of it; (ii) ceramics are a part of the materials used for an MEMS device or a monolithic fabrication of MEMS and ceramics; and finally, (iii) using ceramics as packaging solution for MEMS devices. We elaborate on how ceramics may be superior substitutes over other materials when delicate MEMS-based systems need to be assembled or packaged by a simpler fabrication process as well as their advantages when they need to operate in harsh environments.

show abstract

Review: MEMS sensors for flow separation detection

Cited by 3 publications

References 109 publications

MEMS Switch Realities: Addressing Challenges and Pioneering Solutions

MEMS Switch Realities: Addressing Challenges and Pioneering Solutions

Pressure-insensitive magnetic shear force sensor with pillar structure for versatile application

Ceramics for Microelectromechanical Systems Applications: A Review

Contact Info

Product

Resources

About