Review of advanced CMOS technology for post-Moore era

Li, Ming

doi:10.1007/s11433-012-4930-3

Cited by 24 publications

(11 citation statements)

References 36 publications

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“…Silicon was adapted as a mechanical material with the advent of microelectromechanical systems (MEMS) 108 and, subsequently, employed in the first microfluidic analytical system. 109 Owing to high-resolution microfabrication technique development (feature size as low as 22 nm are attainable with mass fabrication 110 ), fine fluidic channels and microfluidic components can be created on a silicon substrate. Naturally or artificially grown oxide on the silicon surface makes silanol-based chemistries compatible with for protein immobilization on silicon.…”

Section: Siliconmentioning

confidence: 99%

Protein immobilization techniques for microfluidic assays

2013

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Microfluidic systems have shown unequivocal performance improvements over conventional bench-top assays across a range of performance metrics. For example, specific advances have been made in reagent consumption, throughput, integration of multiple assay steps, assay automation, and multiplexing capability. For heterogeneous systems, controlled immobilization of reactants is essential for reliable, sensitive detection of analytes. In most cases, protein immobilization densities are maximized, while native activity and conformation are maintained. Immobilization methods and chemistries vary significantly depending on immobilization surface, protein properties, and specific assay goals. In this review, we present trade-offs considerations for common immobilization surface materials. We overview immobilization methods and chemistries, and discuss studies exemplar of key approaches—here with a specific emphasis on immunoassays and enzymatic reactors. Recent “smart immobilization” methods including the use of light, electrochemical, thermal, and chemical stimuli to attach and detach proteins on demand with precise spatial control are highlighted. Spatially encoded protein immobilization using DNA hybridization for multiplexed assays and reversible protein immobilization surfaces for repeatable assay are introduced as immobilization methods. We also describe multifunctional surface coatings that can perform tasks that were, until recently, relegated to multiple functional coatings. We consider the microfluidics literature from 1997 to present and close with a perspective on future approaches to protein immobilization.

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Section: Siliconmentioning

confidence: 99%

Protein immobilization techniques for microfluidic assays

2013

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“…As the further development of multigate devices, gateall-around nanowire devices have been paid much attention recently [10]- [13]. Due to its unique structure nature, nanowire device has even more complicated LER [21]- [23].…”

Section: Extend To 3-d Lermentioning

confidence: 99%

“…RDF is the dominant statistical variability in traditional planar devices [2]- [7]. Recently, with better gate control, novel devices such as multigate (MG) devices with ultrathin body have been introduced for 22 nm technology node and beyond [10]- [13], which have lightly doped or intrinsic channels, and thus reduce RDF effect dramatically. However, the contribution of LER/LWR-induced variability is increasing [14]- [18].…”

Section: Introductionmentioning

confidence: 99%

Investigations on Line-Edge Roughness (LER) and Line-Width Roughness (LWR) in Nanoscale CMOS Technology: Part I–Modeling and Simulation Method

Jiang

Wang

et al. 2013

IEEE Trans. Electron Devices

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In this paper, the correlation between line-edge roughness (LER) and line-width roughness (LWR) is investigated. Based on the characterization methodology of autocorrelation functions (ACF), a new theoretical model of LWR is proposed, which indicates that the LWR ACF is composed of two parts: one involves LER information; the other involves the cross-correlation of the two edges. Additional characteristic parameters for LER/LWR are proposed to represent the missing cross-correlation information in conventional approaches of LER/LWR description, other than LER/LWR amplitude and auto-correlation length. An improved simulation method forcorrelated LERs is also proposed, which can provide helpful guidelines for the characterization, modeling, and the optimization of LER/LWR in nanoscale CMOS technology. The experimental results and device simulation results are discussed in detail in the part II of this paper.

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“…If Moore's Law comes to an end, what would be the future of the integrated circuit industry? Three approaches are proposed in the related literature as the key plans to perpetuate the development of the integrated circuit industry, namely "more Moore" (Li, 2012), "more than Moore" (Graef, 2011;Salah, 2017) and "beyond CMOS" (Hutchby et al, 2002;Bernstein et al, 2010;Nikonov and Young, 2013;Nikonov and Young, 2015;Pan and Naeemi, 2017).…”

Section: Introductionmentioning

confidence: 99%

Quantum Spin-Wave Materials, Interface Effects and Functional Devices for Information Applications

Jin

Liao

et al. 2020

Front. Mater.

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With the continuous miniaturization of electronic devices and the increasing speed of their operation, solving a series of technical issues caused by high power consumption has reached an unprecedented level of difficulty. Fortunately, magnons (the quanta of spin waves), which are the collective precession of spins in quantum magnetic materials, making it possible to replace the role of electrons in modern information applications. In the process of information transmission, nano-sized spin-wave devices do not transport any physical particles; therefore, the corresponding power consumption is extremely low. This review focuses on the emerging developments of the spin-wave materials, tunable effects, and functional devices applications. In the materials front, we summarize the magnetic properties and preparation characteristics of typical insulating single-crystalline garnet films or metallic alloy films, the development of new spin-wave material system is also introduced. Afterward, we introduce the emerging electric control of spin-wave effects originating from the interface transitions, physical or chemical, among these films including, voltage-controlled magnetic anisotropy, magneto-ionic transport, electric spin-torque, and magnon-torque. In the functional devices front, we summarize and elaborate on the low dispassion information processing devices and sensors that are realized based on spin waves.

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Review of advanced CMOS technology for post-Moore era

Cited by 24 publications

References 36 publications

Protein immobilization techniques for microfluidic assays

Protein immobilization techniques for microfluidic assays

Investigations on Line-Edge Roughness (LER) and Line-Width Roughness (LWR) in Nanoscale CMOS Technology: Part I–Modeling and Simulation Method

Quantum Spin-Wave Materials, Interface Effects and Functional Devices for Information Applications

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