2021
DOI: 10.25130/tjes.28.1.05
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Review of Nanosheet Transistors Technology

Abstract: Nano-sheet transistor can be defined as a stacked horizontally gate surrounding the channel on all direction. This new structure is earning extremely attention from research to cope the restriction of current Fin Field Effect Transistor (FinFET) structure. To further understand the characteristics of nano-sheet transistors, this paper presents a review of this new nano-structure of Metal Oxide Semiconductor Field Effect Transistor (MOSFET), this new device that consists of a metal gate material. Lateral nano-… Show more

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Cited by 8 publications
(5 citation statements)
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“…The germanium content of the SiGe layers should be reduced as much as feasible to mitigate lattice distortion and other deficiencies. [6][7][8] The etch selectivity does, however, increase with Ge concentration, and degradation of the silicon layers during inner spacer indentation or channel release etch will affect channel thickness and, consequently, threshold voltage. [8] Nanowire technology seems to be left behind compared to Nanosheet.…”
Section: Gaafet 3d Structurementioning
confidence: 99%
“…The germanium content of the SiGe layers should be reduced as much as feasible to mitigate lattice distortion and other deficiencies. [6][7][8] The etch selectivity does, however, increase with Ge concentration, and degradation of the silicon layers during inner spacer indentation or channel release etch will affect channel thickness and, consequently, threshold voltage. [8] Nanowire technology seems to be left behind compared to Nanosheet.…”
Section: Gaafet 3d Structurementioning
confidence: 99%
“…28 Additionally, the outcome of temperature has also been studied on linearity and distortion FOMs. The linearity and distortion FOMs are estimated as per Equations (9)(10)(11)(12)(13)(14)(15)(16) and designed in relation of gate voltage.…”
Section: Impact Of Temperaturementioning
confidence: 99%
“…Nanosheet FETs offer performance and power efficiency advantages, but face challenges including complex manufacturing, variability in device parameters, and increased power consumption due to additional interfaces. Further research is needed to address these challenges and optimize nanosheet FET performance 6–9 . Among these designs, surrounded gate Nanowire MOSFET shows better immunity to short‐channel effects (SCEs) because of higher gate control 10,11 .…”
Section: Introductionmentioning
confidence: 99%
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“…Switching to an NSFET solves most of the problems associated with a FinFET, including the need for constant scaling down, short channel regression, manufacturing complexity, and restricted device performance. It has been observed that the utilisation of NSFET is a suitable alternative for FinFET and nanowire transistors [4]. Mismatches in I ON current seem to have less of an effect on NSFETs than NWFETs [6].…”
Section: Introductionmentioning
confidence: 99%