2017
DOI: 10.1016/j.optlaseng.2017.02.004
|View full text |Cite
|
Sign up to set email alerts
|

Review of surface profile measurement techniques based on optical interferometry

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
5

Citation Types

0
27
0
1

Year Published

2018
2018
2024
2024

Publication Types

Select...
6
2
1

Relationship

0
9

Authors

Journals

citations
Cited by 94 publications
(28 citation statements)
references
References 35 publications
0
27
0
1
Order By: Relevance
“…Contact measurements provide good presentation of surface morphology, but the time needed to gather data is much longer than that required by the contactless methods [25]. Contactless methods are optical methods, which can themselves be divided into the optical confocal method, interferometry, scatterometry, triangulation, and the structured light method [26][27][28][29]. The confocal method assembles a spatial surface image from planes on which light successively focuses during the measurement process.…”
Section: Introductionmentioning
confidence: 99%
“…Contact measurements provide good presentation of surface morphology, but the time needed to gather data is much longer than that required by the contactless methods [25]. Contactless methods are optical methods, which can themselves be divided into the optical confocal method, interferometry, scatterometry, triangulation, and the structured light method [26][27][28][29]. The confocal method assembles a spatial surface image from planes on which light successively focuses during the measurement process.…”
Section: Introductionmentioning
confidence: 99%
“…Based on the surface characteristics of the object, the non-contact three-dimensional surface imaging techniques could be divided into two categories: techniques to measure the specular surfaces [1][2][3][4][5] and techniques to measure the diffuse surfaces [6][7][8][9][10][11][12][13][14][15][16][17][18] . No matter for the specular surfaces or the diffuse surfaces, the robust measurement with one-shot is very challenging, however, it is highly desired especially when the measured surfaces are dynamic and deformable.…”
Section: Introductionmentioning
confidence: 99%
“…No matter for the specular surfaces or the diffuse surfaces, the robust measurement with one-shot is very challenging, however, it is highly desired especially when the measured surfaces are dynamic and deformable. As a result, many one-shot methods have been proposed for specular surface measurement [1][2][3][4][5] and diffuse surface measurement [11][12][13][14][15][16][17][18] . Each proposed method has its own merits or limitations and its application is also limited.…”
Section: Introductionmentioning
confidence: 99%
“…Existing measurement methods of parts can be divided into contact and noncontact. The noncontact measurement method is extensively used in the mechanical industry given the protection of an objective surface, high measurement accuracy, and large measurement range [5,6]. Noncontact measurement in reverse engineering mainly focuses on 2D image processing [7,8] and 3D scanning data processing [9][10][11].…”
Section: Introductionmentioning
confidence: 99%