Review of φ(ρz) curves in electron probe microanalysis

Riveros, José A.; Castellano, G.

doi:10.1002/xrs.1300220103

Cited by 20 publications

(20 citation statements)

References 32 publications

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“…9,13 In addition, it is clear that Eqn (3) will become invalid when E < J/1.166 and S becomes negative. Rao-Sahib and Wittry 14 proposed that the Bethe expression could be used at energies above the energy corresponding to the inflection point in the function describing the inverse of the stopping power, i.e.…”

Section: Modification Of Rao-sahib and Wittrymentioning

confidence: 96%

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Monte Carlo strategies for simulations of electron backscattering from surfaces

Jabłoński

Powell

Tanuma

2005

Surface & Interface Analysis

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Reliable algorithms for simulation of electron trajectories in solids are needed for quantification of Auger-electron spectroscopy, particularly for the determination of the backscattering factor (BF). The computational schemes for this purpose should be universal, i.e. applicable to any solid for energies down to 50 eV. In addition, the algorithms should ideally require simple input parameters, e.g. the stoichiometry of the solid and the experimental configuration. Previous Monte Carlo simulations have often been based on the continuous slowing down approximation (CSDA), a relatively simple and convenient approach. However, this approach requires information on the electron stopping power for a given solid. General expressions for the stopping power are briefly reviewed and discussed. We report results of BF calculations for Cu M 3 VV, Ag M 5 VV, and Au N 67 VV Auger transitions from Monte Carlo simulations based on the CSDA in which stopping powers from optical data and from Tougaard's two-parameter universal inelastic-scattering cross section were employed. The resulting BFs, for primary energies between 500 eV and 10 keV, differed by up to 12% (at an energy of 10 keV). BFs from the Monte Carlo algorithm based on the CSDA were compared with similar results from a more sophisticated code involving simulations of individual elastic-and inelastic-scattering events. Both algorithms yielded equivalent BFs for the same Auger transitions with primary energies exceeding 1000 eV; at lower energies, deviations up to 10% occurred because of an approximation in the evaluation of an integral.

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Section: Modification Of Rao-sahib and Wittrymentioning

confidence: 96%

“…More complex relations between the mean excitation energy and the atomic number, for use in EPMA, have been briefly reviewed by Riveros and Castellano. 13 Other work, however, has shown an irregular dependence of J/Z upon Z. 6 Figure 3.2 of Ref.…”

Section: J D 135 Z In Evmentioning

confidence: 97%

Monte Carlo strategies for simulations of electron backscattering from surfaces

Jabłoński

Powell

Tanuma

2005

Surface & Interface Analysis

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“…Same as Fig. 3 but on the Sewell's data base [34] [30] Bastin [30] Bastin [30] Bastin [30] a,b,c The results were taken from [5], [10], [15] respectively. …”

Section: Medium To Heavy Element Analyses (Z > 10)mentioning

confidence: 99%

“…A large number of measured data are usually taken into account to test a correction program [3][4][5][6][7][8][9][10][11][12][13][14][15]32]. For all these measurements, the calculated K-ratio (K') is compared to the measured K-ratio (K).…”

Section: Performance Of the Modelmentioning

confidence: 99%

An accurate computer correction program for quantitative electron probe microanalysis

1994

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Abstract. The aim of this paper is to present a practical and accurate program of correction based on a new mathematical description of q~(pz), which allows a global correction combining atomic number and absorption correction [ZA]. Key words: EPMA, computer program, correction procedure, X-ray depth distribution.Electron probe microanalysis (EPMA) requires several corrections to quantify a specimen. These corrections allow to convert the measured intensity of the characteristic X-ray into elemental concentration. The measured intensity I~ emitted from element A in a homogeneous sample is expressed (in the absence of significant fluorescence effects) by: I~ = cst " C A J o tb e(PZ) " exp(--ZePZ) dpz ,where Ca is the weight fraction of element A, pz is the mass depth in the sample,

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“…where is the elastic mean free path at a given j e (E) energy E calculated from j e \ (Np e )~1 (18) and N is the atomic density, i.e. the number of atoms per unit volume.…”

Section: Theorymentioning

confidence: 99%

The Excitation Depth Distribution Function for Auger Electrons Created by Electron Impact

Jabłoński

Tougaard²

1997

Surf. Interface Anal.

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A theoretical Monte Carlo model for calculations of the excitation depth distribution function (EDDF) deÐning the distribution of ionizations caused by impact of medium energy electrons has been developed. Within this model, the energy losses are described by the Universal cross-section, which has successfully been applied for peak shape analysis at medium energies. Furthermore, the proposed model accounts for the energy dependence of the di †erential elastic scattering cross-sections, which may be very pronounced at medium energies. It has been found that the mean range of subshell ionizations in iron at 1250 eV extends only down to ¿40 This result conÐrms an L 3 Ó. experimental value found recently from analysis of the Fe spectral shape. Very good agreement is also L 3 MM observed between experimental and theoretical mean ionization depths obtained at higher energies. The shape of the EDDF closely resembles the shape of the /(qz) function used in the formalism of electron probe microanalysis. Similarly with the /(qz) function, the EDDF initially increases with depth to reach a maximum and then monotonically decays. The EDDF resulting from the present theoretical model has been compared with the /(qz) function derived from the experimental data acquired at much higher energies (BASTIN 86 algorithm). Unexpectedly, this simple formula was in reasonably good agreement with the present calculations in the energy range 1250-4000 eV and for a wide range of atomic numbers. It is concluded that the BASTIN 86 algorithm is a reasonable approximation of the EDDF function for AES.

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Review of φ(ρz) curves in electron probe microanalysis

Cited by 20 publications

References 32 publications

Monte Carlo strategies for simulations of electron backscattering from surfaces

Monte Carlo strategies for simulations of electron backscattering from surfaces

An accurate computer correction program for quantitative electron probe microanalysis

The Excitation Depth Distribution Function for Auger Electrons Created by Electron Impact

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