“…The most important procedure for extracting model parameters arises from the determination of the extrinsic elements, as it strongly affects the extraction result of the whole small-signal model. Earlier works often didn't take the substrate effect into account [2] , and obtained the extrinsic resistances by simplified equations Re( ) , Re( ) ,and Re( ) at zero-bias, which is limited to low frequencies, as it omits the influence of the lossy Si substrate region beneath the drain-bulk junction. The method in [3], [4], and [5] extracting parasitic resistances in strong inversion( , 0) neglects the dependence of drain resistance on drain-source voltage, which does not apply to LDMOSFET.…”