2020
DOI: 10.3390/coatings10080791
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RF/DC Magnetron Sputtering Deposition of Thin Layers for Solar Cell Fabrication

Abstract: Thin film Cu(In,Ga)Se2 (CIGS)-based solar cells with relatively high efficiency and low material usage might become a promising alternative for crystalline silicon technology. The most challenging task nowadays is to decrease the PV module fabrication costs by application of easily scalable industrial process. One of the possible solutions is the usage of magnetron sputtering system for deposition of all structures applied in CIGS-based photovoltaic device. The main object of these studies was fabrication and … Show more

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Cited by 15 publications
(12 citation statements)
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“…Sputtering is a physical vapor deposition procedure with a high film deposition rate and low-temperature structures, making it a good technique [67,68]. It is fast and inexpensive to create thin films of alloys, metals, nitrides, carbides, and oxides [69][70][71].…”
Section: B Sputtering Techniquesmentioning
confidence: 99%
See 1 more Smart Citation
“…Sputtering is a physical vapor deposition procedure with a high film deposition rate and low-temperature structures, making it a good technique [67,68]. It is fast and inexpensive to create thin films of alloys, metals, nitrides, carbides, and oxides [69][70][71].…”
Section: B Sputtering Techniquesmentioning
confidence: 99%
“…The integrated pulse energy, time of deposition, pressure in the chamber, plasma gas, target-to-substrate angle, and substrate temperature are all crucial elements in diminishing dopant redistribution and defect creation during high-temperature processing. There are several types of high-quality thin films, such as boron carbon nitride [68], aluminum oxide [75], gallium oxide [76], and others [77], deposited via the magnetron sputtering technique [67]. For readers interested in the history of the thin-film sputter deposition process, we recommend consulting the reference [78].…”
Section: B Sputtering Techniquesmentioning
confidence: 99%
“…Carbon nanotubes (CNT), nanocomposites and nanocrystals with suitable valence band edges are also materials that can be used to overcome the contradicting effects [91][92][93]. Thermal evaporation, magnetron sputtering and chemical etching [94][95][96][97][98], electrostatic spray assisted vapor deposition [99], electrospinning, and annealing indium tin oxide (ITO) processes [100,101] are preparation methods that have influential roles in the electrical and optical parameters. Enhanced operational characteristics of the examined devices, such as the short circuit current, Isc, the open circuit voltage, Voc and the fill factor, FF, can relate surface/layer treatment with the photoconversion efficiency, n, via the output power derived, P, following equation:…”
Section: Impacts Of Materials Properties and Fabrication Processesmentioning
confidence: 99%
“…This fabrication relies on the formulation of an ink based on CuO, In 2 O 3 , and Ga 2 O 3 nanoparticles (NPs), and subsequent screen printing of the ink followed by selenization [ 8 ], which converts the resultant thin film of oxide NPs into the desired CIGS phase. An interesting feature of such printing fabrication processes is that it is more sustainable in comparison to classical CIGS PV fabrication based on energy-demanding vacuum methods [ 9 ]. Nevertheless, the employment of a selenization step during the fabrication of the CIGS PV is a shortcoming due to the potential risk it carries through the high toxicity of the evolved selenium species, i.e., Se vapor and H 2 Se gas.…”
Section: Introductionmentioning
confidence: 99%