2019
DOI: 10.1109/jsen.2019.2931766
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RF Sputtered CeO2Thin Films-Based Oxygen Sensors

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Cited by 26 publications
(6 citation statements)
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“…Its (111) diffraction peak is the strongest. This is because the energy of the (111) crystal plane in CeO 2 cubic fluorite structure is low, 22 and the Ce 1‐ x Co x O 2 films by RF sputtering preferentially grow along the (111) plane. Weak (200), (220), (311), (222), (400), and (331) diffraction peaks were also observed, indicating that the RF sputtering Ce 1‐ x Co x O 2 films are polycrystalline structure.…”
Section: Resultsmentioning
confidence: 99%
“…Its (111) diffraction peak is the strongest. This is because the energy of the (111) crystal plane in CeO 2 cubic fluorite structure is low, 22 and the Ce 1‐ x Co x O 2 films by RF sputtering preferentially grow along the (111) plane. Weak (200), (220), (311), (222), (400), and (331) diffraction peaks were also observed, indicating that the RF sputtering Ce 1‐ x Co x O 2 films are polycrystalline structure.…”
Section: Resultsmentioning
confidence: 99%
“…Taken these results together, the performance of the organohydrogel-based O 2 sensors, including the sensitivity, LOD, stretchability, transparency, linearity, detection range, and operation temperature range, showing huge advantages compared with solid-state oxygen sensors based on other sensing materials (Table 1). [55][56][57][58][59][60][61][62][63] For instance, the response of Xylitol-O O 2 sensor (72.2% to 200 ppm) is higher than that of CeO 2 , TiO 2 , and 2D Bi 2 O 2 Se for similar O 2 concentrations. 56,57,61 The broad detection range is also advantageous for practical applications.…”
Section: Gas Sensing Performancementioning
confidence: 99%
“…[55][56][57][58][59][60][61][62][63] For instance, the response of Xylitol-O O 2 sensor (72.2% to 200 ppm) is higher than that of CeO 2 , TiO 2 , and 2D Bi 2 O 2 Se for similar O 2 concentrations. 56,57,61 The broad detection range is also advantageous for practical applications. Although 100 ppm was the lowest concentration offered in the experimental settings, the organohydrogel sensors should be capable of sensing under lower concentration according to the low theoretical detection limit (0.585 ppm).…”
Section: Gas Sensing Performancementioning
confidence: 99%
“…Depending on the presence of valance electrons the electronic structure of cerium vary as a result the cerium present in mixed valance state. This property makes this material an important place in industry for various applications as heterogeneous catalyst for oxidizing hazard gasses [1], water gas splitting [2], in memristors for application in meromorphic computing [3] also as a photodiode [4]. Minimization of redox reaction temperature of cerium oxide to make it useful as heterogeneous catalyst is one of the most challenging work now a days.…”
Section: Introductionmentioning
confidence: 99%