Ring resonator designed for biosensing applications manufactured on 300 mm SOI in an industrial environment

Abstract

This paper reports on the design and characterization of a silicon nitride ring resonator-based device for biosensing manufactured with the STMicroelectronics 300 mm R&D Datacom Advanced PHotonic Nanoscale Environment (DAPHNE) industrial platform. The experimental results demonstrate a 300 nm/RIU bulk sensitivity and a 0.125 nm resonant peak shift per nanometer of biological adlayer thickness change. These results, comparable to the state of the art in ring resonator-based biosensors, demonstrate the potential of the DAPHNE industrial platform for manufacturing high-performance photonics biosensors at low cost.

Critical assessment of relevant methods in the field of biosensors with direct optical detection based on fibers and waveguides using plasmonic, resonance, and interference effects

“…The first years of development and application as well as some configurations are given in [9]. Recent activities are demonstrated in [142]. In many publications, the high sensitivity is argued as an advantage of such ring resonator systems [143].…”

Improving silicon nitride ring resonator performances on 300 mm industrial environment for point of care applications (Conference Presentation)

“…Working in an industrial environment is important because one of the key points of POCT is that the production per device should be cheap. It is then paramount to already work with in the condition of a 300mm SOI industrial platform [3]. Once the rings were manufactured at STMicroelectronics, a polydimethylsiloxane (PDMS) ring was glued to the device surface to contain the fluids used during measurements.…”