Ripple pattern formation on silicon surfaces by low-energy ion-beam erosion: Experiment and theory

Ziberi, B.; Frost, Frank; Höche, Thomas; Rauschenbach, B.

doi:10.1103/physrevb.72.235310

Cited by 207 publications

(163 citation statements)

References 34 publications

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“…The BH theory explains several experimental observations, most notably the widespread observation of ''ripple rotation'': with increasing tilt from normal incidence, first the appearance of ''parallel-mode ripples'' (wave vector parallel to the projected ion beam) and then a transition to ''perpendicular-mode ripples'' (wave vector perpendicular to the ion beam). However, serious contradictions have recently emerged, related both to predictions of instabilities and amplification rates not seen experimentally, as well as to incorrect prediction of patterns in the nonlinear regime [1,5]. Resolving these inconsistencies is crucial for developing a theoretical framework for even qualitatively predicting evolving surface patterns, and is thus of critical importance for learning how to control and manipulate the surface patterns by ion irradiation.…”

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confidence: 99%

Multiple Bifurcation Types and the Linear Dynamics of Ion Sputtered Surfaces

et al. 2008

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confidence: 99%

Multiple Bifurcation Types and the Linear Dynamics of Ion Sputtered Surfaces

et al. 2008

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“…The systems where perpendicular ripples are observed experimentally may, therefore, act as test cases for pattern formation models (e.g. 250-2,000 eV Ar on Si [46,48,49,68,69], 5 keV Xe on Fe and Ni [70,71], 5-10 keV Xe on Si [64,72], 800 eV Ar on Au and Ag [73,74] keV Ar ions on different metals [75], 500 eV Ar on SiO 2 [47]). My simulations are in good agreement with many of these experimental observations.…”

Section: Discussionmentioning

confidence: 99%

Surface instability and pattern formation by ion-induced erosion and mass redistribution

Hofsäß

2013

Appl. Phys. A

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The contribution of curvature dependent sputtering and mass redistribution to ion-induced self-organized formation of periodic surface nanopatterns is revisited. Ion incidence angle-dependent curvature coefficients and ripple wavelengths are calculated from 3-dimensional collision cascade data obtained from binary collision Monte Carlo simulations. Significant modifications concerning mass redistribution compared to the model of Carter and Vishnyakov and also models based on crater functions are introduced. Furthermore, I find that curvature-dependent erosion is the dominating contribution to pattern formation, except for very low-energy irradiation of a light matrix with heavy ions. The major modifications regarding mass redistribution and ion-induced viscous flow are related to the ion incidence angle-dependent thickness of the irradiated layer. A smaller modification concerns the relaxation of inward-directed mass redistribution. Ioninduced viscous flow in the surface layer also depends on the layer thickness and is thus strongly angle dependent. Simulation results are presented and compared to a variety of published experimental results. The simulations show that in most cases curvature-dependent erosion is the dominant contribution to surface instability and ripple pattern formation and also determines the pattern orientation transition. The simulations predict the occurrence of perpendicular ripple patterns at larger ion incidence angles, in agreement with experimental observations. Mass redistribution causes stabilization of the surface at near-normal ion incidence angles and dominates pattern formation only at very low ion energies.

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“…On the one hand, observations of periodic patterns including highaspect ratio quantum dots 3 , with occasional long-range order 4 and characteristic spacing, as small as 7 nm (ref. 5), have stimulated interest in self-organized pattern formation as a means of sub-lithographic nanofabrication 6 .…”

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Molecular dynamics of single-particle impacts predicts phase diagrams for large scale pattern formation

et al. 2011

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Energetic particle irradiation can cause surface ultra-smoothening, self-organized nanoscale pattern formation or degradation of the structural integrity of nuclear reactor components. A fundamental understanding of the mechanisms governing the selection among these outcomes has been elusive. Here we predict the mechanism governing the transition from pattern formation to flatness using only parameter-free molecular dynamics simulations of single-ion impacts as input into a multiscale analysis, obtaining good agreement with experiment. our results overturn the paradigm attributing these phenomena to the removal of target atoms via sputter erosion: the mechanism dominating both stability and instability is the impact-induced redistribution of target atoms that are not sputtered away, with erosive effects being essentially irrelevant. We discuss the potential implications for the formation of a mysterious nanoscale topography, leading to surface degradation, of tungsten plasma-facing fusion reactor walls. Consideration of impact-induced redistribution processes may lead to a new design criterion for stability under irradiation.

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Ripple pattern formation on silicon surfaces by low-energy ion-beam erosion: Experiment and theory

Cited by 207 publications

References 34 publications

Multiple Bifurcation Types and the Linear Dynamics of Ion Sputtered Surfaces

Multiple Bifurcation Types and the Linear Dynamics of Ion Sputtered Surfaces

Surface instability and pattern formation by ion-induced erosion and mass redistribution

Molecular dynamics of single-particle impacts predicts phase diagrams for large scale pattern formation

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