Direct Torque Control of three phase Induction Motor (IM) is an outstanding method and also the state-ofart based on instantaneous space vector theory. It is highly commercialized which reflects that it has many advantages over dc commutator motors and Vector control of IM. In this paper High Power Switches, Vector Control, Direct Self Control and Direct Torque control (DTC) principle and in addition to that MEMS and its various applications are elaborated. It also highlights the use of DTC in the intelligent manufacturing technology as industrial manipulator and so it can be useful for MEMS also .This is the reflection of fact that voltage vector has sampling time in microseconds which controls torque and flux. Simulation has been carried on with 5 HP IM using Power System Blocksets in Simulink/Matlab environment and results are presented to show its feasibility.