Robust sliding-mode control of electrostatic torsional micromirrors beyond the pull-in limit

Yazdi, N.; Sane, H.S.; Kudrle, T.D.; Mastrangelo, Carlos H.

doi:10.1109/sensor.2003.1217049

Cited by 33 publications

(18 citation statements)

References 13 publications

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“…(It should be noted that pull-in of a parallel plate scanner can be mitigated by feed back control. 42 ) The large electrostatic torque allows for the design of a relatively stiff torsion bar, this increases the resonant frequency and therefore the scan speed and bandwidth of the device. Higher resonant frequencies also provide insurance against unwanted excitation from environmental vibrations.…”

Section: Electrostatic Vertical Combdrive Scannersmentioning

confidence: 99%

Scanning micromirrors: an overview

et al. 2004

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An overview of the current state of the art in scanning micromirror technology for switching, imaging, and beam steering applications is presented. The requirements that drive the design and fabrication technology are covered. Electrostatic, electromagnetic, and magnetic actuation techniques are discussed as well as the motivation toward combdrive configurations from parallel plate configurations for large diameter (mm range) scanners. Suitability of surface micromachining, bulk micromachining, and silicon on insulator (SOI) micromachining technology is presented in the context of the length scale and performance for given scanner applications.

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Section: Electrostatic Vertical Combdrive Scannersmentioning

confidence: 99%

Scanning micromirrors: an overview

et al. 2004

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“…Although the undesired pull-in instability problem exists in the electrostatic actuation technique, various feedback control schemes [1][2][3][4][5][6][7][8] have been reported to extend the scanning field of electrostatic actuation mechanism, such as robust sliding mode control (SMC) [1], integral SMC [2], flatness based control [3], nonlinear control [4][5][6][7] and robust adaptive control [8].Considering the intrinsic nonlinearity of the electrostatic torques, feedback control approaches [9][10][11][12][13][14][15][16] have been proposed to improve the scanning and tracking performance of electrostatically actuated micromirrors, such as closed-loop adaptive control [9], nonlinear closed-loop control [10], flatness based control [11], multi-loop digital control [12], modified SMC [13][14][15] and second order SMC (2-SMC) [16].…”

Section: Introductionmentioning

confidence: 99%

Application of twisting algorithm to a 2D electrostatic MEMS micromirror

Chen

Pallapa

Sun

et al. 2013

2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale

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In this paper, a second-order sliding mode control (2-SMC) scheme, called twisting algorithm, is applied to control an electrostatically actuated 2D torsional MEMS micromirror. The proposed twisting algorithm is able to improve the transient and positioning performance of the controlled 2D micromirror including robustness against model uncertainties and external disturbances. The main advantages of the proposed scheme over the first-order SMC are chattering attenuation and enhanced positional accuracy. The closed-loop stability and higher performance of the micromirror under closed-loop control is verified though numerical simulations and experiments.

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“…In this paper, of particular interest are the authors' positive views on the potential of employing Sliding Mode control (SMC), being a particular form of Variable Structure Control [31], for microactuator devices. Different Sliding Mode controllers for microactuators have been proposed in the literature: in [25] for a simplified optical switch system, and in [20] for an application of electrostatic torsional micromirrors, while [19] discuss sliding mode control with integral action (for tracking purposes) for the stabilization of dual-axis micromirrors beyond the pull-in.…”

Section: Introductionmentioning

confidence: 99%

Sliding mode control design of an electrostatic microactuator using LPV schemes

Alwi

Zolotas

Edwards

et al. 2012

2012 American Control Conference (ACC)

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This paper presents preliminary results of a robust linear parameter varying (LPV)-based sliding mode voltage controller for a parallel-plate electro-static microactuator. The controller design aims to extend the travelling range of the microactuator plates beyond the, so-called, `pull-in' condition, thus taking advantage of an increased range of operation. The designed controller is successful in extending the microactuator's plates operation beyond the pull-in condition with moderate controller complexity, while guaranteeing robustness against matched uncertainty. Results illustrate, that the controller also provides a degree of robustness to unmatched uncertainty (i.e. spring stiffness variation). Appropriate simulation studies, on the nonlinear normalized microactuator model, are employed to assess the efficacy of the proposed controller

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Robust sliding-mode control of electrostatic torsional micromirrors beyond the pull-in limit

Cited by 33 publications

References 13 publications

Scanning micromirrors: an overview

Scanning micromirrors: an overview

Application of twisting algorithm to a 2D electrostatic MEMS micromirror

Sliding mode control design of an electrostatic microactuator using LPV schemes

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