Robust tracking for nanopositioning stages using sliding mode control with active disturbance rejection: Design and implementation

Abstract

This paper presents the design and implementation of a novel sliding mode control integrated with active disturbance rejection (SMCDR) for precise robust trajectory tracking of piezoelectric nanopositioning stages. The model uncertainties, nonlinearity, and external disturbances of the piezoelectric nanopositioning stage are regarded as a lumped disturbance, which is estimated by an extended state observer. The active disturbance rejection control (ADRC) strategy is used to realize a preliminary trajectory tracking, while the sliding mode control is adopted to handle the estimation error and residual uncertainties, and to improve the tracking performance. The exponential stability of the proposed SMCDR is proved using Lyapunov’s direct method. The proposed SMCDR controller combines the strength of both ADRC and sliding mode control, exhibits a simple structure, requires only the position measurements, and does not require any information of model parameters except for an approximate constant gain. Experimental results reveal the robustness of the SMCDR approach in suppressing the hysteresis of piezoelectric actuator, and illustrate the superior performance over conventional ADRC, integral sliding mode controller (ISMC) and PID controller for trajectory tracking control of piezoelectric nanopositioning stages.

Research on Active Repetitive Control for Tracking Lissajous Scan Trajectories with Voice Coil Motors Actuated Fast Steering Mirror

“…Existing FSM control systems are based on feedback control, namely a post-correction step: when an output error is detected, the controller adjusts the output. Therefore, when the tracking error is large, the use of large gains to adjust the control output may lead to overshoot [18,19]. A controller based on the traditional proportional-integral-derivative (PID) method typically produces a large control output under the joint action of the gain and the integration link [20].…”

Input channel gain adaptive active disturbance rejection control based on robust adaptive finite‐time parameter estimation

“…Zhang et al [25] proposed two adaptive laws to eliminate the influence of disturbance observation error and ICG uncertainty. To tackle the estimation error of ESO, Wang et al [30] created a sliding mode control integrated with active disturbance rejection (SMCDR). However, the question of whether these techniques are still useful for the greater (over 50%) and faster parameter variations of ICG throughout the control process has not been addressed.…”