2001
DOI: 10.1007/s11664-001-0004-4
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Role of barrier and buffer layer defect states in AlGaN/GaN HEMT structures

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Cited by 16 publications
(7 citation statements)
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“…Our simulations show that only the defects in the AlGaN layer have an effect on the 2DEG density. This is consistent with previous LEEN studies looking at the impact of deep level traps in AlGaN [23]. Fig.…”
Section: Deg Density and Defect Location And Energysupporting
confidence: 93%
See 1 more Smart Citation
“…Our simulations show that only the defects in the AlGaN layer have an effect on the 2DEG density. This is consistent with previous LEEN studies looking at the impact of deep level traps in AlGaN [23]. Fig.…”
Section: Deg Density and Defect Location And Energysupporting
confidence: 93%
“…The 2DEG in AlGaN/GaN heterostructures is charge sensitive and the placement of defects affects the charge balance in the structure and thus the operation of the HEMT itself. Studies with low energy electron nanoscale spectroscopy (LEEN) have shown that the presence of deep level defects in the AlGaN layer can reduce the 2DEG confinement through a reduction in band gap [23]. Section IV of this paper will discuss the effect of defects at various energies and spatial locations within the different regions of the device.…”
Section: B Vacancies and Defects In Gan And Alganmentioning
confidence: 99%
“…Lateral DRCLS obtained from specific depths provides information on composition and defects to account for the variations in HEMT properties. Figures 18(a) and (b) depict the lateral and cross-sections geometries of this application, respectively [101][102][103][104][105][106]. Figure 18(a) shows how DRCL spectra are acquired at increasing radial distances of the wafer.…”
Section: Application To Transistorsmentioning
confidence: 99%
“…[8] All of these charges are functions of the gate voltage, and contribute to the transfer characteristics of the FET. In addition all of them are vulnerable to modification by external probes: the heterojunction and the spontaneous polarization are sensitive to changes in the doping distribution caused by field-induced motion of the doping atoms [9], and the piezoelectric charge by relaxation of stress at the interface due to field-induced motion of dislocations [10]. Current transport through an intact barrier is primarily via tunneling, which is sensitive both to the height and the width of the barrier.…”
Section: Discussionmentioning
confidence: 99%