2008
DOI: 10.1109/tns.2008.2001705
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Electrostatic Mechanisms Responsible for Device Degradation in Proton Irradiated AlGaN/AlN/GaN HEMTs

Abstract: Displacement-damage induced degradation in AlGaN/AlN/GaN HEMTs with polarization charge induced 2DEGs is examined using simulations and experiments. Carrier removal in the unintentionally doped AlGaN layer changes the space charge in the structure and this changes the band bending. The band bending decreases the 2DEG density, which in turn reduces the drain current in the device. The effect of the defect energy levels on the 2DEG density is also studied. The interplay between carrier removal, mobility degradat… Show more

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Cited by 62 publications
(41 citation statements)
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“…Many literature papers report that the most probable defect created by proton irradiation is Gallium vacancy, often described as the main responsible of the device degradation in displacement damage, by means of a 2DEG density reduction and mobility degradation [3,9]. First principle simulations correlate the Gallium vacancy point defect to an acceptor-like trap placed 0.80 eV from the valance band [10].…”
Section: Discussionmentioning
confidence: 99%
“…Many literature papers report that the most probable defect created by proton irradiation is Gallium vacancy, often described as the main responsible of the device degradation in displacement damage, by means of a 2DEG density reduction and mobility degradation [3,9]. First principle simulations correlate the Gallium vacancy point defect to an acceptor-like trap placed 0.80 eV from the valance band [10].…”
Section: Discussionmentioning
confidence: 99%
“…Experimental data from Karmarkar et al, Kalavagunta et al, and Liu et al quantify the amount of mobility reduction for given amounts of proton irradiation as shown in the figure. 5,6,14 Higher proton fluence elicits a larger drop in mobility. Karmarkar at al., Kalavagunta et al, and Patrick et al also quantify the concentration of displacement-related defects (Gallium and Nitrogen vacancies) created by the proton irradiation via TRIM calculations.…”
Section: Resultsmentioning
confidence: 99%
“…Karmarkar at al., Kalavagunta et al, and Patrick et al also quantify the concentration of displacement-related defects (Gallium and Nitrogen vacancies) created by the proton irradiation via TRIM calculations. 5,6,19 We assume that only the acceptor-like Gallium vacancies (V Ga ) are ionized near the two-dimensional electron gas (2DEG) since the Fermi level is above the conduction band edge and thus excludes donor ionization. Thus, V Ga concentrations given by the TRIM simulations are plotted against mobility reductions in Figure 3.…”
Section: Resultsmentioning
confidence: 99%
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“…Detailed evaluation has been performed in order to understand the impact of both proton energy [11] and fluence [9][10][11][12][13][14][15][16][17].…”
Section: Introductionmentioning
confidence: 99%