“…In the 150–200 °C temperature range, the BCD defect dissociates, and substitutional boron (B S ) is recovered [ 34 , 35 , 36 , 40 , 41 , 42 ]. It is worth mentioning that B S can also react with silicon vacancy (V) or divacancy (V 2 ) and form B S V and B S V 2 complexes [ 43 , 44 , 45 , 46 ]. These vacancy-type defects have different characteristics compared to those of BCD in terms of generation, thermal stability, and charge trapping.…”