2015
DOI: 10.15587/1729-4061.2015.47224
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Role of boron in formation of secondary radiation defects in silicon

Abstract: Ґрунтуючись на колишні роботи авторів, досліджено роль домішок бору (B) у формуванні вторинних радіаційних дефектів в кристалах кремнію (Si). Залежності цих процесів від температури ізохронного відпалу (в інтервалі 80-600 °C) вивчені з використанням холлівських вимірювань температурних залежностей (в інтервалі 100-300 К) концентрації і рухливості дірок в кремній до і після опромінення електронами з енергією близько 8 МеВ при дозі 5•10 15 см-2 Ключові слова: кремній, легуючий бор, радіаційні дефекти і комплекси… Show more

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Cited by 2 publications
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“…In the 150–200 °C temperature range, the BCD defect dissociates, and substitutional boron (B S ) is recovered [ 34 , 35 , 36 , 40 , 41 , 42 ]. It is worth mentioning that B S can also react with silicon vacancy (V) or divacancy (V 2 ) and form B S V and B S V 2 complexes [ 43 , 44 , 45 , 46 ]. These vacancy-type defects have different characteristics compared to those of BCD in terms of generation, thermal stability, and charge trapping.…”
Section: Introductionmentioning
confidence: 99%
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“…In the 150–200 °C temperature range, the BCD defect dissociates, and substitutional boron (B S ) is recovered [ 34 , 35 , 36 , 40 , 41 , 42 ]. It is worth mentioning that B S can also react with silicon vacancy (V) or divacancy (V 2 ) and form B S V and B S V 2 complexes [ 43 , 44 , 45 , 46 ]. These vacancy-type defects have different characteristics compared to those of BCD in terms of generation, thermal stability, and charge trapping.…”
Section: Introductionmentioning
confidence: 99%
“…The B S V defect dissociates at 260 K, and thus it is not detected in samples irradiated at ambient temperatures [ 43 , 44 ]. On the other hand, B S V 2 can form only in heavily doped material [ 44 , 45 ] or after annealing out divacancies at temperatures above 250 °C [ 46 ]. Thus, the AR process in samples irradiated at ambient temperatures is explained by considering a reaction between the substitutional boron (B s ) and silicon interstitials (Si i ) created by irradiation.…”
Section: Introductionmentioning
confidence: 99%