Roll-to-Roll Fabrication for OLED Lighting Using Ultra-Thin Glass Substrate and Encapsulating Stainless Steel Foil

Furukawa, T.; Hauptmann, Jacqueline; Nakagaki, Tomoki; Ikeuchi, Ryosuke; Sagawa, Masahiko; Nagata, Daisuke; Nakatsuka, Jun

doi:10.36463/idw.2021.0948

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“…We have been developing organic light-emitting diode (OLED) lighting using a roll-to-roll process 1), 2), 3) . The substrate material is either a plastic film or ultra-thin glass.…”

Section: Introductionmentioning

confidence: 99%

[Paper] High-Gas-Barrier Film for Organic Light-Emitting Diode Lighting

Furukawa,

Taira,

Chiba

et al. 2024

MTA

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Y, Kobe Steel) that can perform plasma-enhanced chemical vapor deposition (PE-CVD) and three types of sputtering deposition. The PE-CVD system was developed by Okimoto et al. 9) . The CVD system is shown in Figure 1. This system has a pair of CVD rollers, which are part of the roll-to-roll film conveying system and act as electrodes to generate plasma between them. A nonrotating magnet system is set on the CVD rollers. Each roller is equipped with two magnets. A powerful magnetron discharge plasma is excited in the zone between the CVD rollers covered by the substrate.

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“…We have been developing organic light-emitting diode (OLED) lighting using a roll-to-roll process 1), 2), 3) . The substrate material is either a plastic film or ultra-thin glass.…”

Section: Introductionmentioning

confidence: 99%