An overview is presented of progress in GaN electronic devices along with
recent results from work at UCSB. From 1995 to 2001, the power performance of
AlGaN/GaN high electron mobility transistors (HEMT) improved from 1.1 to
11 W mm-1, respectively. The disadvantage of the low thermal conductivity
of the sapphire substrate was mitigated by flip-chip bonding onto AlN
substrates, yielding large periphery devices with an output power of 7.6 W. A
variety of HEMT amplifier circuits have been demonstrated. The first AlGaN/GaN
heterojunction bipolar transistor (HBT) was demonstrated in 1998, with a
current gain of about 3. By developing the technique of emitter regrowth, a
current gain of 10 was achieved in both GaN BJTs and AlGaN/GaN HBTs. A common
emitter current gain cutoff frequency of 2 GHz was measured. Critical issues
involved in the growth of high quality AlGaN/(AlN)/GaN heterostructures and
GaN:Mg by metal-organic chemical vapour deposition (MOCVD) and molecular beam
epitaxy (MBE) and the device fabrication are discussed.