Room temperature diamond-like carbon coatings produced by low energy ion implantation

Markwitz, A.; Mohr, Berit; Leveneur, Jérôme

doi:10.1016/j.nimb.2013.11.026

Cited by 18 publications

(15 citation statements)

References 17 publications

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“…The software TRIM [41] was used to calculate the carbon and hydrogen penetration depths and backscattering yield for carbon and silicon substrates. A density of 3.2 g cm − 3 was used for the DLC coating based on results from 6 kV ion implanter investigations [15]. The density of 2.32 g cm −3 was used for silicon.…”

Section: Distribution Of Ion Speciesmentioning

confidence: 99%

“…Both the carbon and hydrogen longitudinal ranges decrease with increasing carbon content in the molecules. Carbon atoms from propane, butane and pentane ions are in the range of subplantation as defined in [10,15], which results in a higher fraction of sp 3 bonds. Carbon atoms from C 2 H x + and CH x + are outside the 100-650 V window which leads to implantation into the surface, resulting in sp 2 bonds.…”

Section: Distribution Of Ion Speciesmentioning

confidence: 99%

“…Tetrahedral amorphous carbon (ta-C) coatings are known to be very hard (hardness N 60 GPa), show low surface friction (friction coefficient b 0.1) and are very strong (Young's modulus N 800 GPa) [10,11]. Alternative fabrication methods are ion implantation and ion deposition using mass or non-mass selected molecular ion beams [12][13][14][15] with varying contents of sp 3 -and sp 2 -hybridized carbon atoms [10]. The sp 3 content in the coatings can be adjusted by the ion energy based on a so-called 'subplantation' process [10,16].…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Ultra-smooth diamond-like carbon coatings with high elasticity deposited at low temperature by direct ion beam deposition

Markwitz

Mohr

Carpeño

et al. 2014

Surface and Coatings Technology

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Section: Distribution Of Ion Speciesmentioning

confidence: 99%

Section: Distribution Of Ion Speciesmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Ultra-smooth diamond-like carbon coatings with high elasticity deposited at low temperature by direct ion beam deposition

Markwitz

Mohr

Carpeño

et al. 2014

Surface and Coatings Technology

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“…Ion bombardment significantly affects the performance of the layers. Preferred surface properties are produced by carbonbased coating surfaces with sp 2 and sp 3 hybridizations [13]. In order to optimize the carbon-based layer deposition method, it is necessary to understand the mechanisms involved in the growing process and in the degradation process [13,14].…”

Section: Introductionmentioning

confidence: 99%

Protective Sliding Carbon-Based Nanolayers Prepared by Argon or Nitrogen Ion-Beam Assisted Deposition on Ti6Al4V Alloy

Vlcak

Jirka

2016

Journal of Nanomaterials

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The microstructure and the surface properties of samples coated by carbon-based nanolayer were investigated in an effort to increase the surface hardness and reduce the coefficient of friction of the Ti6Al4V alloy. Protective carbon-based nanolayers were fabricated by argon or nitrogen ion-beam assisted deposition at ion energy of 700 eV on Ti6Al4V substrates. The Raman spectra indicated that nanolayers had a diamond-like carbon character with sp2rich bonds. The TiC and TiN compounds formed in the surface area were detected by X-ray diffraction. Nanoscratch tests showed increased adhesion of a carbon-based nanolayer deposited with ion assistance in comparison with a carbon nanolayer deposited without ion assistance. The results showed that argon ion assistance leads to greater nanohardness than a sample coated by a carbon-based nanolayer with nitrogen ion assistance. A more than twofold increase in nanohardness and a more than fivefold decrease in the coefficient of friction were obtained for samples coated by a carbon-based nanolayer with ion assistance, in comparison with the reference sample.

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“…We have taken a new approach to develop a sensor for dihydrogen sulfide (H 2 S) using an ion implanted hydrogenated diamond-like carbon (DLC) coating on a silicon wafer based on our recent development of micrometre thick DLC coatings fabricated by direct ion deposition [10][11][12]. Our DLC coatings contain carbon atoms in sp 2 and sp 3 states.…”

Section: Introductionmentioning

confidence: 99%

Transition Metal Ion Implantation into Diamond‐Like Carbon Coatings: Development of a Base Material for Gas Sensing Applications

Markwitz

Leveneur

Gupta

et al. 2015

Journal of Nanomaterials

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Micrometre thick diamond-like carbon (DLC) coatings produced by direct ion deposition were implanted with 30 keV Ar+and transition metal ions in the lower percentage (<10 at.%) range. Theoretical calculations showed that the ions are implanted just beneath the surface, which was confirmed with RBS measurements. Atomic force microscope scans revealed that the surface roughness increases when implanted with Ar+and Cu+ions, whereas a smoothing of the surface from 5.2 to 2.7 nm and a grain size reduction from 175 to 93 nm are measured for Ag+implanted coatings with a fluence of1.24×1016 at. cm−2. Calculated hydrogen and carbon depth profiles showed surprisingly significant changes in concentrations in the near-surface region of the DLC coatings, particularly when implanted with Ag+ions. Hydrogen accumulates up to 32 at.% and the minimum of the carbon distribution is shifted towards the surface which may be the cause of the surface smoothing effect. The ion implantations caused an increase in electrical conductivity of the DLC coatings, which is important for the development of solid-state gas sensors based on DLC coatings.

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Room temperature diamond-like carbon coatings produced by low energy ion implantation

Cited by 18 publications

References 17 publications

Ultra-smooth diamond-like carbon coatings with high elasticity deposited at low temperature by direct ion beam deposition

Ultra-smooth diamond-like carbon coatings with high elasticity deposited at low temperature by direct ion beam deposition

Protective Sliding Carbon-Based Nanolayers Prepared by Argon or Nitrogen Ion-Beam Assisted Deposition on Ti6Al4V Alloy

Transition Metal Ion Implantation into Diamond‐Like Carbon Coatings: Development of a Base Material for Gas Sensing Applications

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