Room temperature growth of biaxially aligned yttria-stabilized zirconia films on glass substrates by pulsed-laser deposition

Abstract

Room temperature deposition of biaxially textured yttria-stabilized zirconia (YSZ) films on amorphous glass substrates was successfully achieved by conventional pulsed-laser deposition. The influence of the surrounding gases, their pressure and the deposition time on the structure of the films was studied. A columnar growth process was revealed based on the experimental results. The grown biaxial texture appears as a kind of substrate independence, which makes it possible to fabricate in-plane aligned YSZ films on various substrates.

Pulsed-laser deposition of textured cerium oxide thin films on glass substrates at room temperature

“…Further, increasing the rate of deposition from 3 Hz (film A) to 10 Hz (film B) did not have any effect on the crystallinity or orientation of films. Thus, O 2 as ambient gas did not yield oriented CeO 2 films as was observed in case of YSZ [19].…”

“…The high speed particles, generally 10 3 -10 4 m/s, generated in the plume during PLD can assist the growth of film in channeling direction when suitable laser pulse energy, substrate-target distance and gas pressure is used [19]. PLD of biaxially textured (100) ZrO 2 (YSZ) films [19] on glass at room temperature indicate that the experimental conditions (substrate-target distance 2 cm, 0.4 Pa O 2 , 2 Jcm − 2 fluence, repetition rate 10 Hz, target parallel to substrate) yielded ions in the ablation plume with sufficient energy and direction for channeling ZrO 2 in b100N direction. Applying similar experimental conditions did not produce caxis oriented CeO 2 film which may be due to the material itself.…”

“…Further, our studies show that films deposited with standard PLD conditions (0.0133 Pa O 2 , repetition rate 10 Hz, substrate-target distance 8 cm, fluence 2 J/cm 2 ) was amorphous. Hence, it was thought worthwhile to explore the possibility of obtaining textured CeO 2 films by utilizing the PLD parameters as reported by Li et al [19]. This paper reports the PLD of CeO 2 films on glass at room temperature and the effect of ambient gas, rate of deposition and fluence on CeO 2 films.…”

“…Films deposited without IBAD at 90°C were polycrystalline with (111), (200), (220) and (311) X-ray diffraction (XRD) lines. Wang [19] demonstrated the PLD of biaxially textured (100) films on glass substrates at room temperature without any ion-beam assistance but by utilizing deposition conditions that lead to IBAD. High speed particles in the plume was used for texturing by using appropriate laser pulse energy, substrate -target distance and gas pressure.…”

Ferroelectric domain structures and polarization switching characteristics of polycrystalline BiFeO3 thin films on glass substrates

“…For this reason, glass is frequently regarded as a substitute for substrates in the devices fabrication. Yttria-stabilized zirconia (YSZ) is known to be an attractive buffer layer on glass for the subsequent deposition of perovskite oxide thin films, because it is well crystallized on glass substrates even at room temperature [13,14].…”