Room temperature H2S micro-sensors with anti-humidity properties fabricated from NiO-In2O3 composite nanofibers

Abstract

NiO-In 2 O 3 composite nanofibers are synthesized via electrospinning and calcining techniques. Micro-sensors are fabricated by sputtering Pt electrodes on Si chips to form sensor substrates, and then spinning the NiO-In 2 O 3 composite nanofibers onto the sensor substrate surface. The as-fabricated micro-sensors exhibit excellent H 2 S sensing properties at room temperature. The sensitivity of the micro-sensors is up to 6 when the sensors are exposed to 3 L/L H 2 S, and the corresponding response and recovery times are 14 and 22 s, respectively. The micro-sensors also exhibit high selectivity and good stability. Especially, the micro-sensors can operate at various humidity conditions. The sensitivity of the micro-sensors is 3.8 to 3 L/L H 2 S at 75% relative humidity. These characteristics make the micro-sensors good candidates for practical H 2 S sensors with high performance. gas sensors, nanofibers, micro-sensors, metal oxide semiconductors, nanomaterials Citation:Yue X J, Hong T S, Yang Z, et al. Room temperature H 2 S micro-sensors with anti-humidity properties fabricated from NiO-In 2 O 3 composite nanofibers.

Adsorption of Hydrogen Sulfide on Reduced Graphene Oxide-Wrapped Titanium Dioxide Nanofibers

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Zinc‐Reduced Mesoporous TiOx Li‐Ion Battery Anodes with Exceptional Rate Capability and Cycling Stability

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