Room temperature high hydrogen gas response in Pd/TiO
            <sub>2</sub>
            /Si/Al capacitive sensor

Ratan, Smrity; Kumar, Chandan; Kumar, Amit; Jarwal, Deepak Kumar; Mishra, Ashwini Kumar; Upadhyay, Rishibrind Kumar; Singh, Abhinav Pratap; Jit, Satyabrata

doi:10.1049/mnl.2020.0154

Cited by 14 publications

(7 citation statements)

References 35 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Due to the strong adsorption of TMA at 250 °C, numerous TMA molecules enter into void/free regions of the Co 3 O 4 @ZnO layer; these TMA molecules polarize subsequently because of the applied electric field. Hence, ε of the sensing layer increases, that is, capacitance of the sensor increases. ,, Unlike the chemiresistive sensing mechanism, capacitance response is not affected severely by surface redox reaction. Therefore, the capacitive sensor has more stable baseline.…”

Section: Results and Discussionmentioning

confidence: 99%

See 1 more Smart Citation

MOF-Derived Porous Hollow Co₃O₄@ZnO Cages for High-Performance MEMS Trimethylamine Sensors

Yan

Ling

et al. 2021

ACS Sens.

View full text Add to dashboard Cite

Trimethylamine (TMA) sensors based on metal oxide semiconductors (MOS) have drawn great attention for realtime seafood quality evaluation. However, poor selectivity and baseline drift limit the practical applications of MOS TMA sensors. Engineering core@shell heterojunction structures with accumulation and depletion layers formed at the interface is regarded as an appealing way for enhanced gas sensing performances. Herein, we design porous hollow Co 3 O 4 @ZnO cages via a facile ZIF-67@ZIF-8-derived approach for TMA sensors. These sensors demonstrate great TMA resistive sensing performance (linear response at moderate TMA concentrations (<33 ppm)), and a high sensitivity of ∼41 is observed when exposed to 33 ppm TMA, with a response/recovery time of only 3/2 s. This superior performance benefits from the Co 3 O 4 @ZnO porous hollow structure with maximum heterojunctions and high surface area. Furthermore, great capacitive TMA sensing with linear sensitivity over the full testing concentration range (0.33−66 ppm) and better baseline stability were investigated. A possible capacitive sensing mechanism of TMA polarization was proposed. For practical usage, a portable sensing prototype based on the Co 3 O 4 @ZnO sensor was fabricated, and its satisfactory sensing behavior further confirms the potential for real-time TMA detection.

show abstract

Section: Results and Discussionmentioning

confidence: 99%

“…Hence, ε of the sensing layer increases, that is, capacitance of the sensor increases. 13,31,32 Unlike the chemiresistive sensing mechanism, capacitance response is not affected severely by surface redox reaction. Therefore, the capacitive sensor has more stable baseline.…”

Section: Acs Sensorsmentioning

confidence: 99%

MOF-Derived Porous Hollow Co₃O₄@ZnO Cages for High-Performance MEMS Trimethylamine Sensors

Yan

Ling

et al. 2021

ACS Sens.

View full text Add to dashboard Cite

show abstract

“…New ways to improve sensor performance have been discovered, which now include not only modifying the sensor structure or its chemical composition but also optimizing the measurement process and processing of the sensor output. The classical method of measuring the response of a metal oxide sensor is the measurement of resistance change [182], but measuring changes in complex resistance [197], capacitance [198,199], and measurements under alternating current conditions [200] allows us to enhance and optimize the efficiency of sensors from multiple angles. This amount of data that can be measured in real time requires adequate processing for its effective interpretation.…”

Section: Methods Of Processing Sensor Signals To Improve Sensitivity/...mentioning

confidence: 99%

Metal Oxide-Based Sensors for Ecological Monitoring: Progress and Perspectives

Tereshkov,

Dontsova,

Saruhan

et al. 2024

Chemosensors

View full text Add to dashboard Cite

This paper aims to provide a large coverage of recent developments regarding environmental monitoring using metal oxide-based sensors. Particular attention is given to the detection of gases such as H2, COx, SOx, NOx, and CH4. The developments and analyses of the design of sensors and types of metal oxide sensing materials are emphasized. The sensing mechanisms and peculiarities of metal oxides used in chemoresistive sensors are provided. The main parameters that affect the sensitivity and selectivity of metal oxide sensors are indicated and their significance to the sensor signal is analyzed. Modern data processing algorithms, employed to optimize the measurement process and processing of the sensor signal, are considered. The existing sensor arrays/e-nose systems for environmental monitoring are summarized, and future prospects and challenges encountered with metal oxide-based sensor arrays are highlighted.

show abstract

“…While it is easy to overlook the importance of post-metallization annealing, it remains a key step; during this step, the 5 nm TiO x film also diffuses through the Pt grain boundaries, further increasing the Pt-oxide interface and hence increasing the available number of hydrogen adsorption sites [18]. Moreover, e-beam-evaporated TiO 2 has been studied in a Pd/TiO 2 /Si MOS structure [19,20]. Detection of a 10,000 ppm hydrogen concentration has been shown and an area-dependent drift in the MOS structure has been observed [19].…”

Section: Introductionmentioning

confidence: 99%

CMOS Compatible Hydrogen Sensor Using Platinum Gate and ALD–Aluminum Oxide

Elshaer,

Ecoffey,

Jaouad

et al. 2024

Sensors

View full text Add to dashboard Cite

In this study, a p-Si/ALD-Al2O3/Ti/Pt MOS (metal oxide semiconductor) device has been fabricated and used as a hydrogen sensor. The use of such a stack enables a reliable, industry-compatible CMOS fabrication process. ALD-Al2O3 has been chosen as it can be integrated into the back end of the line (BEOL) or in CMOS, post processing. The device response and recovery are demonstrated with good correlation between the capacitance variation and the hydrogen concentration. Detection down to 20 ppm at 140 °C was obtained and a response time of 56 s for 500 ppm was recorded.

show abstract

Room temperature high hydrogen gas response in Pd/TiO ₂ /Si/Al capacitive sensor

Cited by 14 publications

References 35 publications

MOF-Derived Porous Hollow Co₃O₄@ZnO Cages for High-Performance MEMS Trimethylamine Sensors

MOF-Derived Porous Hollow Co₃O₄@ZnO Cages for High-Performance MEMS Trimethylamine Sensors

Metal Oxide-Based Sensors for Ecological Monitoring: Progress and Perspectives

CMOS Compatible Hydrogen Sensor Using Platinum Gate and ALD–Aluminum Oxide

Contact Info

Product

Resources

About

Room temperature high hydrogen gas response in Pd/TiO 2 /Si/Al capacitive sensor

Cited by 14 publications

References 35 publications

MOF-Derived Porous Hollow Co3O4@ZnO Cages for High-Performance MEMS Trimethylamine Sensors

MOF-Derived Porous Hollow Co3O4@ZnO Cages for High-Performance MEMS Trimethylamine Sensors

Metal Oxide-Based Sensors for Ecological Monitoring: Progress and Perspectives

CMOS Compatible Hydrogen Sensor Using Platinum Gate and ALD–Aluminum Oxide

Contact Info

Product

Resources

About

Room temperature high hydrogen gas response in Pd/TiO ₂ /Si/Al capacitive sensor

MOF-Derived Porous Hollow Co₃O₄@ZnO Cages for High-Performance MEMS Trimethylamine Sensors

MOF-Derived Porous Hollow Co₃O₄@ZnO Cages for High-Performance MEMS Trimethylamine Sensors