2003
DOI: 10.1063/1.1569994
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Room temperature nanocrystalline silicon single-electron transistors

Abstract: Single-electron transistors operating at room temperature have been fabricated in 20-nm-thick nanocrystalline silicon thin films. These films contain crystalline silicon grains 4 -8 nm in size, embedded in an amorphous silicon matrix. Our single-electron transistor consists of a side-gated 20 nmϫ20 nm point contact between source and drain electrodes. By selectively oxidizing the grain boundaries using a low-temperature oxidation and high-temperature argon annealing process, we are able to engineer tunnel barr… Show more

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Cited by 99 publications
(48 citation statements)
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“…[1][2][3][4] The nanometer-scale size of these crystals leads to novel electronic and optical properties associated with quantum confinement and single-electron charging effects. These properties have been exploited for the fabrication of single-electron transistors and memories, 1,5 electron emitters, 6 and silicon light emitting devices. 7 The possibility of precise control of the nanocrystal size and separation, e.g., by plasma decomposition of SiH 4 , 3,7 raises the possibility of large numbers of nanocrystal devices with well defined electrical and optical characteristics.…”
mentioning
confidence: 99%
“…[1][2][3][4] The nanometer-scale size of these crystals leads to novel electronic and optical properties associated with quantum confinement and single-electron charging effects. These properties have been exploited for the fabrication of single-electron transistors and memories, 1,5 electron emitters, 6 and silicon light emitting devices. 7 The possibility of precise control of the nanocrystal size and separation, e.g., by plasma decomposition of SiH 4 , 3,7 raises the possibility of large numbers of nanocrystal devices with well defined electrical and optical characteristics.…”
mentioning
confidence: 99%
“…The required size of the island is of the order of the nm, and therefore out of control of current fabrication processes. Researchers took advantage of natural disorder to create such extremely small islands, mostly with constrictions in disordered thin films 10,11,12,13,14 . More recently 15 undulated thin films have been used, as well as pattern-dependent oxidation 16 .…”
mentioning
confidence: 99%
“…Thus, charging effects can become observable at temperatures that can be achieved by standard cryogenic devices, such as dilution refrigerators. Effort has been put in recent times in reducing this capacitance even further, so that charging effects would be visible at even higher temperatures (preferably at room temperature [20]). This is where novel fabrication methods, based on advances in nanoscience, are essential.…”
Section: Two-junction Devicesmentioning
confidence: 99%